Nanoscale ordering in amorphous silicon powders formed by plasma induced reaction of silane

被引：3

作者：

Hofmeister, H ^{[1
]}

Dutta, J ^{[1
]}

Hofmann, H ^{[1
]}

机构：

[1] SWISS FED INST TECHNOL, DEPT MAT SCI, CH-1015 LAUSANNE, SWITZERLAND

来源：

SYNTHESIS AND PROPERTIES OF MECHANICALLY ALLOYED AND NANOCRYSTALLINE MATERIALS, PTS 1 AND 2 - ISMANAM-96 | 1997年 / 235-2卷

关键词：

nano-sized silicon particles; plasma enhanced chemical vapour deposition; clusters; nanoscale ordering; visible photoluminescence;

D O I：

10.4028/www.scientific.net/MSF.235-238.595

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Nano-sized silicon powders were prepared by gas-phase reactions in a low-pressure silane plasma. The powders consist of highly agglomerated amorphous particles of about 6 to 20 nm size. Internal and surface structure of the particles studied by high resolution electron microscopy agree well with molecular-like modes observed by Raman spectroscopy and observations from in-situ ion-mass spectroscopy which suggest particle formation by cluster generation and agglomeration processes. This nanoscale ordering which was also studied by image contrast calculations following various cluster models is believed to be involved in the visible photoluminescence of these particles.

引用

页码：595 / 600

页数：6

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