Temperature behavior of the APSFET - a porous silicon-based FET gas sensor

被引：8

作者：

Barillaro, G ^{[1
]}

Nannini, A ^{[1
]}

Pieri, F ^{[1
]}

Strambini, LM ^{[1
]}

机构：

[1] Univ Pisa, Dipartimento Ingn Informaz, I-56126 Pisa, Italy

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2004年 / 100卷 / 1-2期

关键词：

gas sensor; porous silicon; polar molecules; alcohol substances;

D O I：

10.1016/j.snb.2003.12.050

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

In this work, the temperature behavior of the adsorption porous silicon FET (APSFET) in the presence of different isopropanol vapors concentrations is investigated. Sensor current at different temperatures and concentrations of the sensed species is measured. Experimental data is analyzed it terms of possible mechanisms involved in the modulation of the sensor current. The temperature dependence of the sensitivity suggests that the mechanism involved in the sensing is some kind of physical adsorption of the sensed species by the porous layer. The sensitivity of the device does not seem to be significantly affected by aging effects. (C) 2004 Elsevier B.V. All rights reserved.

引用

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页码：185 / 189

页数：5

相关论文

共 12 条

[1] Front-side micromachined porous silicon nitrogen dioxide gas sensor [J].

Baratto, C ;

Faglia, G ;

Sberveglieri, G ;

Boarino, L ;

Rossi, AM ;

Amato, G .

THIN SOLID FILMS, 2001, 391 (02) :261-264

[2] Gas detection with a porous silicon based sensor [J].

Baratto, C ;

Comini, E ;

Faglia, G ;

Sberveglieri, G ;

Di Francia, G ;

De Filippo, F ;

La Ferrara, V ;

Quercia, L ;

Lancellotti, L .

SENSORS AND ACTUATORS B-CHEMICAL, 2000, 65 (1-3) :257-259

[3] APSFET: a new, porous silicon-based gas sensing device [J].

Barillaro, G ;

Nannini, A ;

Pieri, F .

SENSORS AND ACTUATORS B-CHEMICAL, 2003, 93 (1-3) :263-270

[4] Integrated porous-silicon light-emitting diodes: A fabrication process using graded doping profiles [J].

Barillaro, G ;

Diligenti, A ;

Pieri, F ;

Fuso, F ;

Allegrini, M .

APPLIED PHYSICS LETTERS, 2001, 78 (26) :4154-4156

[5] Role of parasitics in humidity sensing by porous silicon [J].

Das, J ;

Hossain, SM ;

Chakraborty, S ;

Saha, H .

SENSORS AND ACTUATORS A-PHYSICAL, 2001, 94 (1-2) :44-52

[6] Determination of sensoric parameters of porous silicon in sensing of organic vapors [J].

Holec, T ;

Chvojka, T ;

Jelínek, I ;

Jindrich, J ;

Nemec, I ;

Pelant, I ;

Valenta, J ;

Dian, J .

MATERIALS SCIENCE & ENGINEERING C-BIOMIMETIC AND SUPRAMOLECULAR SYSTEMS, 2002, 19 (1-2) :251-254

[7]

Madou M.J., 1989, Chemical Sensing with Solid State Devices, P67

[8] Extremely sensitive optical sensing of ethanol using porous silicon [J].

Min, HK ;

Yang, HS ;

Cho, SM .

SENSORS AND ACTUATORS B-CHEMICAL, 2000, 67 (1-2) :199-202

[9] A novel surface-micromachined capacitive porous silicon humidity sensor [J].

Rittersma, ZM ;

Splinter, A ;

Bödecker, A ;

Benecke, W .

SENSORS AND ACTUATORS B-CHEMICAL, 2000, 68 (1-3) :210-217

[10] Rapid, reversible, sensitive porous silicon gas sensor [J].

Seals, L ;

Gole, JL ;

Tse, LA ;

Hesketh, PJ .

JOURNAL OF APPLIED PHYSICS, 2002, 91 (04) :2519-2523