Localized picosecond resolution with a near-field microwave/scanning-force microscope

被引:31
作者
vanderWeide, DW
机构
[1] Dept. of Elec. and Comp. Engineering, University of Delaware, Newark
关键词
D O I
10.1063/1.118272
中图分类号
O59 [应用物理学];
学科分类号
摘要
We modify a scanning-force microscope tip/cantilever with a coaxial metal shield for use as an ultra-small field probe, observing 39 ps waveforms on an integrated circuit at a spatial resolution set by the tip radius, the first direct measurements of electric field at these levels of temporal and spatial resolution. This new ability to acquire topography while maintaining constant tip-sample distance for calibrated measurement or excitation of near-zone picosecond time-resolved electric fields is useful not only for probing advanced circuits but also for localized broadband spectroscopy of condensed matter and biological samples. (C) 1997 Americnn Institute of Physics.
引用
收藏
页码:677 / 679
页数:3
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