HIGH-SPEED INTEGRATED-CIRCUIT PROBING USING A SCANNING FORCE MICROSCOPE SAMPLER

被引：8

作者：

HO, F

HOU, AS

BLOOM, DM

机构：

[1] Edward L. Ginzton Laboratory, Stanford University, Stanford

来源：

ELECTRONICS LETTERS | 1994年 / 30卷 / 07期

关键词：

FORCE MEASUREMENT; INTEGRATED CIRCUITS;

D O I：

10.1049/el:19940408

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Using a scanning force microscope as a high-speed all-electrical sampler, the authors have probed voltages on internal nodes of integrated circuits. The authors have demonstrated non-invasive probing through a passivating layer and probing of an Intel 80486 microprocessor.

引用

页码：560 / 562

页数：3

共 6 条

[1] HETERODYNE ELECTROSTATIC FORCE MICROSCOPY FOR NONCONTACT HIGH-FREQUENCY INTEGRATED-CIRCUIT MEASUREMENT [J].