Fabrication of a two-dimensional pH image sensor using a charge transfer technique

被引:93
作者
Hizawa, Takeshi
Sawada, Kazuaki
Takao, Hidekuni
Ishida, Makoto
机构
[1] Toyohashi Univ Technol, Dept Elect & Elect Engn, Toyohashi, Aichi 4418580, Japan
[2] Toyohashi Univ Technol, Intelligent Sensing Syst Res Ctr, Toyohashi, Aichi 4418580, Japan
关键词
OH sensor; CMOS image sensor; charge transfer technique; real-time imaging; chemical reaction;
D O I
10.1016/j.snb.2006.01.056
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
In this paper, a pH image sensor, which is capable of measuring two-dimensional (2-D) distributions and dynamic images of various chemical reactions in real time, is presented. The novel pH imaging sensor developed in this work use a charge transfer technique and with them it is possible to form images of variations in chemical reactions. A prototype pH image sensor was successfully fabricated using complimentary metal-oxide semiconductor (CMOS) circuit process technology and was used to measure two-dimensional distributions of various chemical reactions in moving images at 30 frames/s. It is expected that this sensor can be used for novel applications such as in the medical and biochemistry fields. (c) 2006 Elsevier B.V. All rights reserved.
引用
收藏
页码:509 / 515
页数:7
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