Variation of structural, electrical, and optical properties of Zn1-xMgxO thin films

被引:54
作者
Kim, Jae Won
Kang, Hong Seong
Kim, Jong Hoon
Lee, Sang Yeol
Lee, Jung-Kun
Nastasi, Michael
机构
[1] Yonsei Univ, Dept Elect & Elect Engn, Seodaemoon Ku, Seoul 120749, South Korea
[2] Los Alamos Natl Lab, Mat Sci & Technol Div, Los Alamos, NM 87545 USA
关键词
D O I
10.1063/1.2219153
中图分类号
O59 [应用物理学];
学科分类号
摘要
Zn1-xMgxO thin films on (001) sapphire substrates were deposited using pulsed laser deposition. As the substrate temperature increased, the Mg content in the Zn1-xMgxO thin films increased and the photoluminescence (PL) peak position of the Zn1-xMgxO thin films shifted from 370 to 356 nm, indicating a band gap expansion. Variations of the structural, electrical, and optical properties of Zn1-xMgO thin films have been observed and analyzed by x-ray diffraction, Hall measurements, and PL measurements. (c) 2006 American Institute of Physics.
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页数:5
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