Vacuum ultraviolet absorption spectroscopy for absolute density measurements of fluorine atoms in fluorocarbon plasmas

被引：33

作者：

Sasaki, K

Kawai, Y

Kadota, K

机构：

[1] Department of Electronics, Nagoya University

来源：

APPLIED PHYSICS LETTERS | 1997年 / 70卷 / 11期

关键词：

D O I：

10.1063/1.118582

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Absolute densities of fluorine (F) atoms at the ground state (2p(5 2)p degrees) were measured in helicon-wave excited high-density CF4 plasmas by vacuum ultraviolet (VUV) absorption spectroscopy. By employing an electron cyclotron resonance CF4 plasma as a light source in the VUV wavelength range, an absorption spectroscopy system with no vacuum windows was constructed. As a result, the density of F atoms was approximately 1 x 10(13) cm(-3) for an rf power of 1 kW and a CF4 gas pressure of 2.5 mTorr, which was one-order higher than the density of CFx radicals and was one-order lower than the density of the parent gas. (C) 1997 American Institute of Physics.

引用

页码：1375 / 1377

页数：3

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