Tetrahedrally bonded amorphous carbon

被引：34

作者：

Milne, WI

机构：

来源：

JOURNAL OF NON-CRYSTALLINE SOLIDS | 1996年 / 198卷

关键词：

DEPOSITION; ENERGY;

D O I：

10.1016/0022-3093(95)00773-3

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

This paper will review the work currently being carried out on tetrahedrally bonded amorphous carbon (ta-C). It will include a brief description of the deposition technique and will discuss in some detail the structural, optical and electrical properties of the material and its application to electronic devices.

引用

收藏

页码：605 / 610

页数：6

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