A Novel Approach to Addressable 4 Teradot/in.2 Patterned Media

被引：79

作者：

Xiao, Shuaigang ^{[1
]}

Yang, XiaoMin ^{[1
]}

Park, Soojin ^{[3
]}

Weller, Dieter ^{[2
]}

Russell, Thomas P. ^{[3
]}

机构：

[1] Seagate Technol, Pittsburgh, PA 15222 USA

[2] Seagate Technol, Fremont, CA 94538 USA

[3] Univ Massachusetts, Dept Polymer Sci & Engn, Amherst, MA 01003 USA

来源：

ADVANCED MATERIALS | 2009年 / 21卷 / 24期

基金：

美国国家科学基金会;

关键词：

BLOCK-COPOLYMERS; GRAPHOEPITAXY; LITHOGRAPHY; ARRAYS;

D O I：

10.1002/adma.200802087

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Stable addressable self-assembled dot arrays with an areal density of 1.3-3.8 teradot/in.(2) and a resolution enhancement of at least a factor of 4 are achieved by combining block copolymers (BCPs) in the strong segregation limit, which have spherical microdomains (see inset), with chemically nanopatterned surfaces. The SEM image at the edge of a BCP thin film shows a dense BCP array (see figure, bottom) and the nanopatterned substrate (top).

引用

页码：2516 / +

页数：5

共 14 条

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