Influence of surface structure on segregation and alloy properties in (100)- and (311)-oriented InGaAs/GaAs heterostructures

被引:4
作者
Guimaraes, FEG
GonzalezBorrero, PP
Lubyshev, D
Basmaji, P
机构
[1] Inst. de Fisica de São Carlos, Universidade de São Paulo, 13560-970, São Carlos, SP
基金
巴西圣保罗研究基金会;
关键词
D O I
10.1016/0038-1101(95)00382-7
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The influence of surface orientation and surface structure on indium segregation and alloy properties were systematically studied in InGaAs/GaAs quantum well structures grown by molecular beam epitaxy. (100), (311)A and (311)B surface orientations and different approaches in the growth interruption at the interfaces were used in this investigation. The segregation process and alloy parameters were obtained by photoluminescence and RHEED measurements. We find significant differences in the optical properties and growth kinetic for the three orientations. Using growth interruption we were able to change the surface structure and reduce the segregation process for all orientations.
引用
收藏
页码:659 / 663
页数:5
相关论文
共 13 条
[1]   INDIUM ADATOM MIGRATION DURING MOLECULAR-BEAM EPITAXIAL-GROWTH OF STRAINED INGAAS/GAAS SINGLE QUANTUM WELLS [J].
ARENT, DJ ;
NILSSON, S ;
GALEUCHET, YD ;
MEIER, HP ;
WALTER, W .
APPLIED PHYSICS LETTERS, 1989, 55 (25) :2611-2613
[2]   ATOMIC LAYER MOLECULAR-BEAM EPITAXY (ALMBE) - GROWTH-KINETICS AND APPLICATIONS [J].
BRIONES, F ;
RUIZ, A .
JOURNAL OF CRYSTAL GROWTH, 1991, 111 (1-4) :194-199
[3]   Raman study of interface roughness in (GaAs)(n)(AlAs)(n) superlattices grown on tilted surfaces: Evidence of corrugation of the (113) interface [J].
daSilva, SW ;
Pusep, YA ;
Galzerani, JC ;
Pimenta, MA ;
Lubyshev, DI ;
Borrero, PPG ;
Basmaji, P .
PHYSICAL REVIEW B, 1996, 53 (04) :1927-1932
[4]  
FARAD S, 1994, SUPERLATTICE MICROST, V16, P303
[5]  
GUIMARAES FEG, 1994, SUPERLATTICE MICROST, V15, P365
[6]  
KANTER YO, 1988, THIN SOLID FILMS, V63, P497
[7]   RAMAN-SCATTERING FROM HEAVILY DOPED (311) GAAS-SI GROWN BY MOLECULAR-BEAM EPITAXY [J].
KWOK, SH ;
MERLIN, R ;
LI, WQ ;
BHATTACHARYA, PK .
JOURNAL OF APPLIED PHYSICS, 1992, 72 (01) :285-286
[8]   AMPHOTERIC DOPING OF SI IN INALAS/INGAAS/INP(311)A HETEROSTRUCTURES GROWN BY MOLECULAR-BEAM EPITAXY [J].
LI, X ;
WANG, WI ;
CHO, AY ;
SIVCO, DL .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1993, 11 (03) :912-914
[9]  
MAIHLIOT C, 1990, CRIT REV SOLID STATE, V16, P131
[10]   DIRECT SYNTHESIS OF SEMICONDUCTOR QUANTUM WIRES BY MOLECULAR-BEAM EPITAXY ON (311) SURFACES [J].
NOTZEL, R ;
DAWERITZ, L ;
PLOOG, K .
JOURNAL OF CRYSTAL GROWTH, 1991, 115 (1-4) :318-323