Gas discharge plasmas and their applications

被引：729

作者：

Bogaerts, A

Neyts, E

Gijbels, R

van der Mullen, J

机构：

[1] Univ Instelling Antwerp, Dept Chem, B-2610 Antwerp, Belgium

[2] Eindhoven Univ Technol, Dept Appl Phys, NL-5600 MB Eindhoven, Netherlands

来源：

SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY | 2002年 / 57卷 / 04期

关键词：

plasma; gas discharge; direct current; radio-frequency; pulsed; dielectric barrier discharge; magnetron; surface modification; lamps; lasers; plasma display panels;

D O I：

10.1016/S0584-8547(01)00406-2

中图分类号：

O433 [光谱学];

学科分类号：

0703 ; 070302 ;

摘要：

This paper attempts to give an overview of gas discharge plasmas in a broad perspective. It is meant for plasma spectroscopists who are familiar with analytical plasmas (glow discharges, ICPs and microwave discharges), but who are not so well aware of other applications of these and related plasmas. In the first part, an over-view will be given of the various types of existing gas discharge plasmas, and their working principles will be briefly explained. In the second part, the most important applications will be outlined. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：609 / 658

页数：50

共 196 条

[61] Investigations of the 147 nm radiative efficiency of Xe surface wave discharges [J].