Planar p-on-n HgCdTe heterostructure infrared photodiodes on Si substrates by molecular beam epitaxy

被引:47
作者
Dhar, NK
Zandian, M
Pasko, JG
Arias, JM
Dinan, JH
机构
[1] ROCKWELL INT SCI CTR,THOUSAND OAKS,CA 91360
[2] NIGHT VIS & ELECT SENSORS DIRECTORATE,FT BELVOIR,VA 22060
关键词
D O I
10.1063/1.118683
中图分类号
O59 [应用物理学];
学科分类号
摘要
We have developed a low temperature procedure for molecular beam epitaxy of CdTe buffer layers on {211} Si wafers and have used Si/ZnTe/CdTe composite substrates for molecular beam epitaxy of double layer Hg1-xCdxTe heterostructures. Planar p-on-n double layer heterostructures were formed by an implantation technique and test diodes were fabricated and characterized. At 77 K, devices with 30x30 mu m(2) junction area had R(0)A values in the range 1.5x10(6)-1x10(7) Omega cm(2) with a uniform cut-off wavelength of 4.65 mu m. (C) 1997 American Institute of Physics.
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页码:1730 / 1732
页数:3
相关论文
共 10 条
[1]   MBE HGCDTE HETEROSTRUCTURE P-ON-N PLANAR INFRARED PHOTODIODES [J].
ARIAS, JM ;
PASKO, JG ;
ZANDIAN, M ;
SHIN, SH ;
WILLIAMS, GM ;
BUBULAC, LO ;
DEWAMES, RE ;
TENNANT, WE .
JOURNAL OF ELECTRONIC MATERIALS, 1993, 22 (08) :1049-1053
[2]  
ARIAS JM, 1993, 2 6 SEMICONDUCTOR CO, P509
[3]   MOLECULAR-BEAM EPITAXIAL-GROWTH OF CDTE(112) ON SI(112) SUBSTRATES [J].
DELYON, TJ ;
RAJAVEL, D ;
JOHNSON, SM ;
COCKRUM, CA .
APPLIED PHYSICS LETTERS, 1995, 66 (16) :2119-2121
[4]   Heteroepitaxy of CdTe on {211}Si using crystallized amorphous ZnTe templates [J].
Dhar, NK ;
Wood, CEC ;
Gray, A ;
Wei, HY ;
SalamancaRiba, L ;
Dinan, JH .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1996, 14 (03) :2366-2370
[5]   ETCH PIT CHARACTERIZATION OF CDTE AND CDZNTE SUBSTRATES FOR USE IN MERCURY CADMIUM TELLURIDE EPITAXY [J].
EVERSON, WJ ;
ARD, CK ;
SEPICH, JL ;
DEAN, BE ;
NEUGEBAUER, GT ;
SCHAAKE, HF .
JOURNAL OF ELECTRONIC MATERIALS, 1995, 24 (05) :505-510
[6]   HGCDTE 128X128 INFRARED FOCAL PLANE ARRAYS ON ALTERNATIVE SUBSTRATES OF CDZNTE/GAAS/SI [J].
JOHNSON, SM ;
KALISHER, MH ;
AHLGREN, WL ;
JAMES, JB ;
COCKRUM, CA .
APPLIED PHYSICS LETTERS, 1990, 56 (10) :946-948
[7]   Heteroepitaxy of CdTe on {211}Si substrates by molecular beam epitaxy [J].
Million, A ;
Dhar, NK ;
Dinan, JH .
JOURNAL OF CRYSTAL GROWTH, 1996, 159 (1-4) :76-80
[8]   MOLECULAR-BEAM EPITAXY OF CDTE ON LARGE AREA SI(100) [J].
SPORKEN, R ;
LANGE, MD ;
FAURIE, JP ;
PETRUZZELLO, J .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (03) :1651-1655
[9]   HGCDTE ON GAAS/SI FOR MIDWAVELENGTH INFRARED FOCAL PLANE ARRAYS [J].
ZANIO, K ;
BEAN, R ;
MATTSON, R ;
VU, P ;
TAYLOR, S ;
MCINTYRE, D ;
ITO, C ;
CHU, M .
APPLIED PHYSICS LETTERS, 1990, 56 (13) :1207-1209
[10]  
ZANIO K, 1990, P IRIS SPECIALTY GRO, P191