Soft micromolding and lamination of piezoceramic thick films

被引：21

作者：

Rosqvist, T ^{[1
]}

Johansson, S ^{[1
]}

机构：

[1] Uppsala Univ, Angstrom Lab, Dept Mat Sci, SE-75121 Uppsala, Sweden

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2002年 / 97-8卷

关键词：

PZT; micromolding; PDMS; lamination; microchannels;

D O I：

10.1016/S0924-4247(02)00027-4

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Combining ceramic thick film technology and lithographically based microstructuring technology we have performed micromolding of PZT thick films with lateral features down to 10 mum and aspect ratios up to 7:1 using soft reusable polydimethylsiloxane (PDMS) molds replicated from SU-8 resist masters. For multilayer applications microstructured tapes were laminated using a green tape adhesive and low pressure to preserve dimensional stability. Single and multilayer bodies were fired and the resulting microstructures were studied. The presented work proves it possible to integrate channel microstructuring with multilayer ceramic technology opening up for numerous applications in areas of actuators, fluid handling components and ultrasonic transducers. Related micro structuring techniques for powderbased ceramics are compared regarding reached resolution and aspect ratio. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：512 / 519

页数：8

共 22 条

[1] Slip casting of ceramic microcomponents
Bauer, W
Ritzhaupt-Kleissl, HJ
Hausselt, JH
[J]. MICROSYSTEM TECHNOLOGIES, 1998, 4 (03) : 125 - 127
[2] Bell A. J., 1993, FERROELECTRIC CERAMI, P241
[3] BOWEN LJ, 1993, ULTRASON, P499, DOI 10.1109/ULTSYM.1993.339559
[4] PHOTOLITHOGRAPHIC MICROMOLDING OF CERAMICS USING PLASMA-ETCHED POLYIMIDE PATTERNS
BRIDE, JA
BASKARAN, S
TAYLOR, N
HALLORAN, JW
JUAN, WH
PANG, SW
ODONNELL, M
[J]. APPLIED PHYSICS LETTERS, 1993, 63 (24) : 3379 - 3381
[5] Micromachining of a piezocomposite transducer using a copper vapor laser
Farlow, N
Galbraith, W
Kowles, M
Hayward, G
[J]. IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2001, 48 (03) : 639 - 640
[6] Fine scale 1-3 composites fabricated by the soft mold process:: Preparation and modeling
Gebhardt, S
Schönecker, A
Steinhausen, R
Hauke, T
Seifert, W
Beige, H
[J]. FERROELECTRICS, 2000, 241 (1-4) : 67 - 73
[7] Effect of grain size on actuator properties of piezoelectric ceramics
Hackenberger, W
Pan, MJ
Vedula, V
Pertsch, P
Cao, WW
Randall, C
Shrout, T
[J]. SMART STRUCTURES AND MATERIALS 1998: SMART MATERIALS TECHNOLOGIES, 1998, 3324 : 28 - 36
[8] Hirata Y, 1997, 1997 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1 & 2, P877, DOI 10.1109/ULTSYM.1997.661721
[9] OVERVIEW OF FINE-SCALE PIEZOELECTRIC CERAMIC/POLYMER COMPOSITE PROCESSING
JANAS, VF
SAFARI, A
[J]. JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1995, 78 (11) : 2945 - 2955
[10] Knitter R., 1996, Microsystem Technologies, V2, P135, DOI 10.1007/s005420050030

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