Porous silicon layers used for gas sensor applications

被引：76

作者：

Foucaran, A

PascalDelannoy, F

Giani, A

Sackda, A

Combette, P

Boyer, A

机构：

[1] Centre d'Electronique de Montpellier, Université de Montpellier II, 34000 Montpellier Cedex 5, Place E. Bataillon

来源：

THIN SOLID FILMS | 1997年 / 297卷 / 1-2期

关键词：

porous silicon; gas sensors; electrical measurements and properties;

D O I：

10.1016/S0040-6090(96)09437-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In this communication we report on the elaboration of porous silicon layers for gas sensor applications. We describe our test system for gas sensors, and we investigate the electric characteristics of porous silicon layers (p type) under different gases and levels of humidity. (C) 1997 Elsevier Science S.A.

引用

页码：317 / 320

页数：4

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