Ba2NaNb5O15 thin films prepared by the pulsed laser ablation method

被引:5
作者
Ando, S
Nakamura, Y
Togami, T
Okamura, S
Baba, A
Masuda, Y
Tsukamoto, T
机构
[1] SCI UNIV TOKYO,FAC SCI & ENGN,DEPT ELECT & COMP SCI,YAMAGUCHI 756,JAPAN
[2] HACHINOHE INST TECHNOL,FAC ENGN,DEPT ELECT ENGN,HACHINOHE,AOMORI 013,JAPAN
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1996年 / 35卷 / 9B期
关键词
ferroelectric; Ba2NaNb5O15; thin film; pulsed laser ablation; X-ray diffraction;
D O I
10.1143/JJAP.35.4956
中图分类号
O59 [应用物理学];
学科分类号
摘要
Ferroelectric thin films of barium sodium niobate, Ba2NaNb5O15 (BNN), were prepared on platinum (Pt) substrates by the pulsed laser ablation technique using a BNN: ceramic target. Crystallographic properties and the surface morphology of the BNN thin films prepared were investigated by X-ray diffraction (XRD) and scanning electron microscopy (SEM). Single-phase BNN thin films were prepared at O-2 gas pressure of 1.0x10(-1) Torr with marked (00l) plane orientation. The surface morphology of BNN thin films improved with increasing O-2 gas pressure.
引用
收藏
页码:4956 / 4959
页数:4
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