Poly(dimethylsiloxane)-based packaging technique for microchip fluorescence detection system applications

被引:27
作者
Kim, Young-Hwan [1 ]
Shin, Kyeong-Sik
Kang, Ji-Yoon
Yang, Eun-Gyeong
Paek, Kyeong-Kap
Seo, Dae-Shik
Ju, Byeong-Kwon
机构
[1] Korea Inst Sci & Technol, Microsyst Res Ctr, Seoul 136791, South Korea
[2] Yonsei Univ, Sch Elect & Elect Engn, Seoul 120749, South Korea
[3] Daejin Univ, Dept Elect Engn, Gyeonggi 487711, South Korea
[4] Korea Univ, Dept Elect Engn, Seoul 136701, South Korea
关键词
finger-type p-i-n photodiode; interference filter; microchannel; on-chip; organic light-emitting diode (OLED); poly(dimethylsiloxane) (PDMS)-based packaging;
D O I
10.1109/JMEMS.2006.880355
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 [电气工程]; 0809 [电子科学与技术];
摘要
A simplified integration process including packaging is presented, which enables the realization of the portable fluorescence detection system. A fluorescence detection microchip system consisting of an integrated p-i-n photodiode, an organic light-emitting diode as the light source, an interference filter, and a microchannel was developed. The on-chip fluorescence detector fabricated by poly(dimethylsiloxane) (PDMS)-based packaging had a thin-film structure. A silicon-based integrated p-i-n photodiode combined with an optical filter removed the background noise, which was produced by an excitation source, on the same substrate. The active area of the finger-type p-i-n photodiode was extended to obtain a higher detection sensitivity of fluorescence. The sensitivity and the limit of detection (LOD; S/N = 3) of the system were 0.198 nA/mu M and 10 mu M, respectively.
引用
收藏
页码:1152 / 1158
页数:7
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