Modulating the thickness of the resist pattern for controlling size and depth of submicron reversed domains in lithium niobate

被引：15

作者：

Ferraro, P. ^{[1
]}

Grilli, S. ^{[1
]}

机构：

[1] CNR, INOA, I-80078 Pozzuoli, NA, Italy

来源：

APPLIED PHYSICS LETTERS | 2006年 / 89卷 / 13期

关键词：

D O I：

10.1063/1.2357928

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

In this letter the electric field overpoling is used in combination with two-dimensional resist gratings exhibiting modulated topography and obtained by moire interference lithography. The technique allows one to fabricate shallow submicron domains with lateral size and depth modulated according to the resist profile. Simulations of the electric field distribution in the crystal, in this specific poling configuration, are performed to interpret the mechanism leading to the formation of those surface domains. The results show that in principle complex domain structures could be designed for applications in the field of photonic crystals. (c) 2006 American Institute of Physics.

引用

收藏

页数：3

相关论文

共 13 条

[1] INTERACTIONS BETWEEN LIGHT WAVES IN A NONLINEAR DIELECTRIC [J].

ARMSTRONG, JA ;

BLOEMBERGEN, N ;

DUCUING, J ;

PERSHAN, PS .

PHYSICAL REVIEW, 1962, 127 (06) :1918-+

[2] Surface domain engineering in congruent lithium niobate single crystals: A route to submicron periodic poling [J].

Busacca, AC ;

Sones, CL ;

Apostolopoulos, V ;

Eason, RW ;

Mailis, S .

APPLIED PHYSICS LETTERS, 2002, 81 (26) :4946-4948

[3] Electron-beam-induced domain poling in LiNbO3 for two-dimensional nonlinear frequency conversion -: art. no. 011103 [J].

Glickman, Y ;

Winebrand, E ;

Arie, A ;

Rosenman, G .

APPLIED PHYSICS LETTERS, 2006, 88 (01)

[4] Double-face and submicron two-dimensional domain patterning in congruent lithium niobate [J].

Grilli, S ;

Ferraro, P ;

Sansone, L ;

Paturzo, M ;

De Nicola, S ;

Plerattini, G ;

De Natale, P .

IEEE PHOTONICS TECHNOLOGY LETTERS, 2006, 18 (1-4) :541-543

[5] Surface nanoscale periodic structures in congruent lithium niobate by domain reversal patterning and differential etching [J].

Grilli, S ;

Ferraro, P ;

De Natale, P ;

Tiribilli, B ;

Vassalli, M .

APPLIED PHYSICS LETTERS, 2005, 87 (23) :1-3

[6] Investigation on reversed domain structures in lithium niobate crystals patterned by interference lithography [J].

Grilli, S ;

Ferraro, P ;

De Nicola, S ;

Finizio, A ;

Pierattini, G ;

De Natale, P ;

Chiarini, M .

OPTICS EXPRESS, 2003, 11 (04) :392-405

[7] Characterization of the gray-scale photolithography with high-resolution gray steps for the precise fabrication of diffractive optics [J].

Lu, YT ;

Chu, CS ;

Lin, HY .

OPTICAL ENGINEERING, 2004, 43 (11) :2666-2670

[8]

Miller G., 1998, Ph.D. thesis

[9] Experimental and theoretical characterization of a lithium niobate photonic crystal [J].

Roussey, M ;

Bernal, MP ;

Courjal, N ;

Baida, FI .

APPLIED PHYSICS LETTERS, 2005, 87 (24) :1-3

[10] Sub-100 nm metrology using interferometrically produced fiducials [J].

Schattenburg, ML ;

Chen, C ;

Everett, PN ;

Ferrera, J ;

Konkola, P ;

Smith, HI .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1999, 17 (06) :2692-2697