Observation of current staircase due to large quantum level spacing in a silicon single-electron transistor with low parasitic series resistance

被引:22
作者
Saitoh, M
Hiramoto, T
机构
[1] Univ Tokyo, Inst Ind Sci, Meguro Ku, Tokyo 1538505, Japan
[2] Univ Tokyo, VLSI Design & Educ Ctr, Tokyo 1538505, Japan
关键词
D O I
10.1063/1.1471928
中图分类号
O59 [应用物理学];
学科分类号
摘要
We have fabricated a silicon point-contact channel single-electron transistor (SET) with an ultrasmall dot. By narrowing only the point-contact region and suppressing the parasitic series resistance, a peak conductance as large as 8.8 muS and single-electron addition energy as large as 128 meV are simultaneously obtained. A current staircase due to the large quantum level spacing is clearly observed at low temperatures. From numerical calculations, it is found that the staircase feature due to discrete quantum levels stands out even at room temperature in future silicon SETs with an ultrasmall dot. (C) 2002 American Institute of Physics.
引用
收藏
页码:6725 / 6728
页数:4
相关论文
共 19 条
[1]   EFFECTS OF QUANTUM LEVELS ON TRANSPORT THROUGH A COULOMB ISLAND [J].
FOXMAN, EB ;
MCEUEN, PL ;
MEIRAV, U ;
WINGREEN, NS ;
MEIR, Y ;
BELK, PA ;
BELK, NR ;
KASTNER, MA ;
WIND, SJ .
PHYSICAL REVIEW B, 1993, 47 (15) :10020-10023
[2]   Suppression of effects of parasitic metal-oxide-semiconductor field-effect transistors on Si single-electron transistors [J].
Fujiwara, A ;
Takahashi, Y ;
Namatsu, H ;
Kurihara, K ;
Murase, K .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1998, 37 (6A) :3257-3263
[3]  
Grabert H., 1992, Single Charge Tunneling
[4]   Fabrication of Si nanostructures for single electron device applications by anisotropic etching [J].
Hiramoto, T ;
Ishikuro, H ;
Saito, K ;
Fujii, T ;
Saraya, T ;
Hashiguchi, G ;
Ikoma, T .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1996, 35 (12B) :6664-6667
[5]   On the origin of tunneling barriers in silicon single electron and single hole transistors [J].
Ishikuro, H ;
Hiramoto, T .
APPLIED PHYSICS LETTERS, 1999, 74 (08) :1126-1128
[6]   Coulomb blockade oscillations at room temperature in a Si quantum wire metal-oxide-semiconductor field-effect transistor fabricated by anisotropic etching on a silicon-on-insulator substrate [J].
Ishikuro, H ;
Fujii, T ;
Saraya, T ;
Hashiguchi, G ;
Hiramoto, T ;
Ikoma, T .
APPLIED PHYSICS LETTERS, 1996, 68 (25) :3585-3587
[7]   Quantum mechanical effects in the silicon quantum dot in a single-electron transistor [J].
Ishikuro, H ;
Hiramoto, T .
APPLIED PHYSICS LETTERS, 1997, 71 (25) :3691-3693
[8]   Room temperature coulomb oscillation of a single electron switch with an electrically formed quantum dot and its modeling [J].
Kim, DH ;
Lee, JD ;
Park, BG .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2000, 39 (4B) :2329-2333
[9]   Spin-dependent Coulomb blockade in a silicon-on-insulator-based single-electron transistor [J].
Lee, SD ;
Park, KS ;
Park, JW ;
Moon, YM ;
Choi, JB ;
Yoo, KH ;
Kim, J .
APPLIED PHYSICS LETTERS, 2000, 77 (15) :2355-2357
[10]   Single-electron devices and their applications [J].
Likharev, KK .
PROCEEDINGS OF THE IEEE, 1999, 87 (04) :606-632