Fast infrared light modulation in a-Si:H micro-devices for fiber-to-the-home applications

被引：16

作者：

Cocorullo, G

Della Corte, FG

De Rosa, R

Rendina, I

Rubino, A

Terzini, E

机构：

[1] CNR, IRECE, I-80124 Naples, Italy

[2] ENEA, Ctr Ric Portici, I-80055 Naples, Italy

[3] Univ Calabria, DEIS, I-87036 Cosenza, Italy

来源：

JOURNAL OF NON-CRYSTALLINE SOLIDS | 2000年 / 266卷

关键词：

D O I：

10.1016/S0022-3093(99)00932-1

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

We have produced and measured the properties of a fast switching micro-optic device in a rib-like configuration working at the 1.3 and 1.55 mu m fiber communication wavelengths for fiber-to-the-home applications. The core guiding layer is made of intrinsic hydrogenated amorphous silicon (a-Si:H) deposited by plasma enhanced chemical vapour deposition (PECVD) with absorption coefficients sufficiently small at the wavelength of interest. The signal modulation is performed exploiting the thermo-optic effect of thin film a-Si:H in a Fabry-Perot waveguide integrated interferometer. Switching times <10 mu s have been obtained with two different types of cladding layer. (C) 2000 Published by Elsevier Science B.V. All rights reserved.

引用

页码：1247 / 1251

页数：5

共 8 条

[1] A-Si:H/a-SiC:H waveguides and modulators for low-cost silicon-integrated optoelectronics [J].