A comparison of the gas sensing properties of solid state metal oxide semiconductor gas sensors produced by atmospheric pressure chemical vapour deposition and screen printing

被引:30
作者
Binions, Russell [1 ]
Carmalt, Claire J. [1 ]
Parkin, Ivan P. [1 ]
机构
[1] UCL, Dept Chem, Christopher Ingold Labs, London WC1H 0AJ, England
关键词
chemical vapour deposition; gas sensors;
D O I
10.1088/0957-0233/18/1/024
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The reaction of metal chloride, MCln ( where M = Ga, Sb or Sn) and ethyl acetate under atmospheric pressure chemical vapour deposition (APCVD) conditions leads to the production of metal oxide thin films on a variety of gas sensor substrates. Scanning electron microscopy indicated that an island growth mechanism predominated. X-ray photoelectron spectroscopy revealed binding energy shifts similar to previous literature values. Energy dispersive x-ray analysis, wavelength dispersive x-ray analysis and electron probe microanalysis gave coherent elemental compositions indicating that single-phase materials were made, with negligible impurity levels. The films showed little optical reflectance (similar to 10%) and 65 - 75% total transmission from 400 - 800 nm. Gas sensing experiments indicated that the APCVD produced films responded best to a reducing gas at 450 degrees C, whereas the corresponding screen-printed metal oxide sensors were generally more responsive and responded best to a reducing gas at 500 degrees C.
引用
收藏
页码:190 / 200
页数:11
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