Current collapse and high-electric-field reliability of unpassivated GaN/AlGaN/GaN HEMTs

被引:155
作者
Meneghesso, Gaudenzio [1 ]
Rampazzo, Fabiana [1 ]
Kordos, Peter [1 ]
Verzellesi, Giovanni [1 ]
Zanoni, Enrico [1 ]
机构
[1] Res Ctr Julich, Inst Thin Films & Interface, D-52425 Julich, Germany
关键词
AlGaN/GaN high-electron-mobility transistors (HEMTs); device simulation; gate lag; hot-electron degradation; hot-electron stress;
D O I
10.1109/TED.2006.885681
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Long-term ON-state and OFF-state high-electric-field stress results are presented for unpassivated GaN/AlGaN/GaN high-electron-mobility transistors on SiC substrates. Because of the thin GaN cap. layer, devices show minimal current-collapse effects prior to high-electric-field stress, despite the fact that they are not passivated. Thin comes at the price of a relatively high gate-leakage current. Under the assumption that donor-like electron traps are present within the GaN cap, two-dimensional numerical device simulations provide an explanation for the influence of the GaN cap layer on current collapse and for the correlation between the latter and the gate-leakage current. Both ON-state and OFF-state stresses produce simultaneous current-collapse increase and gate-leakage-current decrease, which can be interpreted to be the result of gate-drain surface degradation and reduced gate electron injection. This study shows that although the thin GaN cap layer is effective in suppressing surface-related dispersion effects in virgin devices, it does not, per se, protect the device from high-electric-field degradation, and it should, to this aim, be adopted in conjunction with other technological solutions like surface passivation, prepassivation surface treatments, and/or field-plate gate.
引用
收藏
页码:2932 / 2941
页数:10
相关论文
共 33 条
[1]   Stable CW operation of field-plated GaN-AlGaN MOSHFETs at 19 W/mm [J].
Adivarahan, V ;
Yang, J ;
Koudymov, A ;
Simin, G ;
Khan, MA .
IEEE ELECTRON DEVICE LETTERS, 2005, 26 (08) :535-537
[2]   10-W/mm AlGaN-GaNHFET with a field modulating plate [J].
Ando, Y ;
Okamoto, Y ;
Miyamoto, H ;
Nakayama, T ;
Inoue, T ;
Kuzuhara, M .
IEEE ELECTRON DEVICE LETTERS, 2003, 24 (05) :289-291
[3]   Impact of layer structure on performance of unpassivated AlGaN/GaN/SiC HEMTs [J].
Bernát, J ;
Wolter, M ;
Fox, A ;
Marso, M ;
Flynn, J ;
Brandes, G ;
Kordos, P .
ELECTRONICS LETTERS, 2004, 40 (01) :78-80
[4]   Trapping effects in GaN and SiC microwave FETs [J].
Binari, SC ;
Klein, PB ;
Kazior, TE .
PROCEEDINGS OF THE IEEE, 2002, 90 (06) :1048-1058
[5]   Power and linearity characteristics of field-plated recessed-gate AlGaN-GaNHEMTs [J].
Chini, A ;
Buttari, D ;
Coffie, R ;
Heikman, S ;
Chakraborty, A ;
Keller, S ;
Mishra, UK .
IEEE ELECTRON DEVICE LETTERS, 2004, 25 (05) :229-231
[6]   Electric-field-related reliability of AlGaAs/GaAs power HFETs: Bias dependence and correlation with breakdown [J].
Dieci, D ;
Sozzi, G ;
Menozzi, R ;
Tediosi, E ;
Lanzieri, C ;
Canali, C .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2001, 48 (09) :1929-1937
[7]   Improved reliability of AlGaN-GaNHEMTs using an NH3 plasma treatment prior to SiN passivation [J].
Edwards, AP ;
Mittereder, JA ;
Binari, SC ;
Katzer, DS ;
Storm, DF ;
Roussos, JA .
IEEE ELECTRON DEVICE LETTERS, 2005, 26 (04) :225-227
[8]   Mechanisms of current collapse and gate leakage currents in AlGaN/GaN heterostructure field effect transistors [J].
Hasegawa, H ;
Inagaki, T ;
Ootomo, S ;
Hashizume, T .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2003, 21 (04) :1844-1855
[9]   STRUCTURE-ENHANCED MOSFET DEGRADATION DUE TO HOT-ELECTRON INJECTION [J].
HSU, FC ;
GRINOLDS, HR .
IEEE ELECTRON DEVICE LETTERS, 1984, 5 (03) :71-74
[10]   Polarization effects, surface states, and the source of electrons in AlGaN/GaN heterostructure field effect transistors [J].
Ibbetson, JP ;
Fini, PT ;
Ness, KD ;
DenBaars, SP ;
Speck, JS ;
Mishra, UK .
APPLIED PHYSICS LETTERS, 2000, 77 (02) :250-252