Modeling and design of multi buried junctions detectors for color systems development

被引：5

作者：

Alexandre, A ^{[1
]}

Sou, G ^{[1
]}

BenChouikha, M ^{[1
]}

Sedjil, M ^{[1
]}

Lu, GN ^{[1
]}

Alquié, G ^{[1
]}

机构：

[1] Univ Paris 06, Lab Instruments & Syst, F-75252 Paris 05, France

来源：

DESIGN, TEST, INTEGRATION, AND PACKAGING OF MEMS/MOEMS, PROCEEDINGS | 2000年 / 4019卷

关键词：

optical detectors; SPICE models; BDJ; BTJ; micro-systems; integrated sensors; system-on-chip; imager;

D O I：

10.1117/12.382313

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Two novel integrated optical detectors called BDJ (Buried Double p-n Junction) detector and BTJ (Buried Triple p-n Junction) detector have been developed in our laboratory. These two detectors have different applications : the BDJ detector elaborated in CMOS process can be used for wavelength or light flux detection while the BTJ detector based on a bipolar structure gives the trichromatics components of a light. To develop microsystems, we need simulation tools as SPICE model. So, we have elaborated a physical model, proposed an parameters extraction method and study influence of different parameters for BDJ detectors. Simulations and measurements have validated these models. More, we propose a design of BTJ detectors for developing new color imaging systems.

引用

页码：288 / 298

页数：11

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