Widely tunable 1.5μm micromechanical optical filter using AlOx/AlGaAs DBR

被引:36
作者
Wu, MS [1 ]
Li, GS [1 ]
Yuen, W [1 ]
Chang-Hasnain, CJ [1 ]
机构
[1] Univ Calif Berkeley, Dept Elect Engn & Comp Sci, Berkeley, CA 94720 USA
关键词
micromechanical devices; optical filters;
D O I
10.1049/el:19971167
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The authors demonstrate, for the first time, a wavelength tunable optical filter at 1.55 mu m using micromechanical tuning of a Fabry-Perot resonator with an AlOx/AlGaAs distributed Bragg reflectors (DBR). The use of thermally oxidised AlAs layers, resulting an ultrawide bandwidth, dramatically increased the tuning range and efficiency of the resonator. Very efficient continuous tuning of > 50nm with only a 0.95V tuning voltage was achieved. The tuning range, limited by our test laser, is expected to be expandable to hundreds of nm.
引用
收藏
页码:1702 / 1704
页数:3
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