Microstructural evolution of laser-exposed silicon targets in SF6 atmospheres

The microstructures formed at the surface of silicon during pulsed-laser irradiation in SF6-rich atmospheres consist of an array of microholes surrounded by microcones. It is shown that there is a dynamic interplay between the formation of microholes and microcones. Fluorine produced by the laser-induced decomposition of SF6 is most likely responsible for the etching/ablation process. It is proposed that silicon-rich molecules and clusters that form in and are ejected from the continually deepening microholes sustain the axial and lateral growth of the microcones. The laser-melted layer at the tip and sides of the cones efficiently collects the silicon-rich products formed upon ablation. The total and partial pressures of SF6 in the chamber play a major role in cone development, a clear indication that it is the laser-generated plasma that controls the growth of these cones. (C) 2000 American Institute of Physics. [S0003-6951(00)01637-5].