PZT thin films for microsensors and actuators: Where do we stand?

被引：312

作者：

Muralt, P ^{[1
]}

机构：

[1] Ecole Polytech Fed Lausanne, Lab Ceram, CH-1015 Lausanne, Switzerland

来源：

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL | 2000年 / 47卷 / 04期

关键词：

D O I：

10.1109/58.852073

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

This paper reviews deposition, integration, and device fabrication of PbZrxTi1-xO3 (PZT) films for applications in micro-electromechanical systems. An ultrasonic micromotor is described as an example. A summary of the published data on piezoelectric properties is given. The figures of merit for various applications are discussed. Some considerations and results on operation, reliability, and depolarization of PZT thin films are presented. The state of the art allows some preliminary conclusions.

引用

页码：903 / 915

页数：13

共 117 条

[111] ELECTRODES FOR PBZRXTI1-XO3 FERROELECTRIC THIN-FILMS [J].

VIJAY, DP ;

DESU, SB .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1993, 140 (09) :2640-2645

[112] Measurement of piezoelectric strength of ZnO thin films for MEMS applications [J].

von Preissig, FJ ;

Zeng, H ;

Kim, ES .

SMART MATERIALS & STRUCTURES, 1998, 7 (03) :396-403

[113] Imprint in ferroelectric capacitors [J].

Warren, WL ;

Tuttle, BA ;

Dimos, D ;

Pike, GE ;

AlShareef, HN ;

Ramesh, R ;

Evans, JT .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1996, 35 (2B) :1521-1524

[114] <bold>On the preparation of PZT thin films by laser ablation deposition</bold> [J].

WATTS, BE ;

LECCABUE, F ;

BOCELLI, G ;

CALESTANI, G ;

CALDERON, F ;

DEMELO, O ;

GONZALEZ, PP ;

VIDAL, L ;

CARRILLO, D .

MATERIALS LETTERS, 1991, 11 (5-7) :183-186

[115] Nucleation and orientation of sol-gel PZT-films on Pt electrodes [J].

Willems, GJ ;

Wouters, DJ ;

Maes, HE ;

Nouwen, R .

INTEGRATED FERROELECTRICS, 1997, 15 (1-4) :19-28

[116] STRUCTURAL, FERROELECTRIC, AND PYROELECTRIC PROPERTIES OF HIGHLY C-AXIS ORIENTED PB1-XCAXTIO3 THIN-FILM GROWN BY RADIO-FREQUENCY MAGNETRON SPUTTERING [J].

YAMAKA, E ;

WATANABE, H ;

KIMURA, H ;

KANAYA, H ;

OHKUMA, H .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (05) :2921-2928

[117] LASER INTERFEROMETER FOR THE STUDY OF PIEZOELECTRIC AND ELECTROSTRICTIVE STRAINS [J].

ZHANG, QM ;

PAN, WY ;

CROSS, LE .

JOURNAL OF APPLIED PHYSICS, 1988, 63 (08) :2492-2496

← 3 4 5 6 7 8 9 10 11 12 →