Auger emission spectrometry;
secondary ion mass spectrometry;
nanotechnology;
D O I:
10.1016/j.sab.2004.10.003
中图分类号:
O433 [光谱学];
学科分类号:
0703 ;
070302 ;
摘要:
This paper reviews a range of instrumental microanalytical techniques for their potential in following the development of nanotechnology. Needs for development in secondary ion mass spectrometry (SIMS), transmission electron microscopy (TEM), Auger emission spectrometry (AES) laser mass spectrometry, X-ray photon spectroscopy are discussed as well as synchrotron-based methods for analysis. Objectives for development in all these areas for the coming 5 years are defined. Developments of instrumentation in three European synchrotron installations are given as examples of ongoing development in this field. (C) 2004 Published by Elsevier B.V.