Integrated microelectromechanical gyroscopes

被引：64

作者：

Xie, HK ^{[1
]}

Fedder, GK

机构：

[1] Univ Florida, Dept Elect & Comp Engn, Gainesville, FL 32611 USA

[2] Carnegie Mellon Univ, Dept Elect & Comp Engn, Pittsburgh, PA 15213 USA

来源：

JOURNAL OF AEROSPACE ENGINEERING | 2003年 / 16卷 / 02期

关键词：

sensors; micromechanics; design; fabrication; electronic equipment;

D O I：

10.1061/(ASCE)0893-1321(2003)16:2(65)

中图分类号：

V [航空、航天];

学科分类号：

08 ; 0825 ;

摘要：

Microelectromechanical (MEMS) gyroscopes have wide-ranging applications including automotive and consumer electronics markets. Among them, complementary metal-oxide semiconductor-compatible MEMS gyroscopes enable integration of signal conditioning circuitry, multiaxis integration, small size, and low cost. This paper reviews various designs and fabrication processes for integrated MEMS gyroscopes and compares their performance. Operational principles and design issues of MEMS vibratory gyroscopes are also addressed.

引用

页码：65 / 75

页数：11

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