Distributed Bragg reflector consisting of high- and low-refractive-index thin film layers made of the same material

被引:121
作者
Schubert, Martin F. [1 ]
Xi, J. -Q. [1 ]
Kim, Jong Kyu [1 ]
Schubert, E. Fred [1 ]
机构
[1] Rensselaer Polytech Inst, Dept Elect Comp & Syst Engn, Troy, NY 12180 USA
基金
美国国家科学基金会;
关键词
D O I
10.1063/1.2720269
中图分类号
O59 [应用物理学];
学科分类号
摘要
A conductive distributed Bragg reflector (DBR) composed entirely of a single material-indium tin oxide (ITO)-is reported. The high- and low-refractive-index layers of the DBR are deposited by oblique-angle deposition and consist of ITO thin films with low and high porosities, which yield an index contrast of Delta n=0.4. A single-material DBR with three periods achieves a reflectivity of 72.7%, in excellent agreement with theory.
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页数:3
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