Tribological properties of silicon nitride ceramics modified by titanium and subsequent oxygen implantation

被引：9

作者：

Brenscheidt, F

Mandl, S

Gunzel, R

Wieser, E

Moller, W

Fischer, W

Herrmann, M

机构：

[1] Rossendorf Inc, Res Ctr, Inst Ion Beam Phys & Mat Res, D-01314 Dresden, Germany

[2] MAT GmbH Dresden, D-01257 Dresden, Germany

[3] Fraunhofer Inst Ceram Technol & Sintered Mat, D-01277 Dresden, Germany

来源：

SURFACE & COATINGS TECHNOLOGY | 1997年 / 97卷 / 1-3期

关键词：

silicon nitride; tribological properties; implantation; ceramics;

D O I：

10.1016/S0257-8972(97)00129-1

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

A silicon nitride-based ceramic was implanted with 150 keV titanium to a fluence of 10(17) ion cm(-2). Subsequently, the samples were implanted with oxygen using plasma immersion ion implantation (PIII) and conventional beam-line implantation to stimulate the formation of lubricating oxides in the surface. The wear is reduced for all implanted samples. The friction coefficient is slightly higher than in the nonimplanted case for all implantation conditions investigated: although oxide formation in the wear track is suggested by detection of a relatively high amount of oxygen in the wear track as indicated by energy-dispersive X-ray spectroscopy (EDX). We discuss the possible mechanisms that lead to the observed tribological behavior. (C) 1997 Elsevier Science S.A.

引用

页码：675 / 679

页数：5

共 11 条

[1]

BLANCHARDARDID CR, 1989, MATER RES SOC S P, V140, P345

[2]

BRENSCHEIDT W, 1997, SURF COAT TECH, V83, P397

[3] A 100 kV 10 a high-voltage pulse generator for plasma immersion ion implantation [J].

Brutscher, J .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1996, 67 (07) :2621-2625

[4] THE FRICTION AND WEAR OF ION-IMPLANTED CERAMICS - THE ROLE OF ADHESION [J].

BULL, SJ ;

PAGE, TF .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1988, 32 (1-4) :91-95

[5] PLASMA SOURCE ION-IMPLANTATION TECHNIQUE FOR SURFACE MODIFICATION OF MATERIALS [J].

CONRAD, JR ;

RADTKE, JL ;

DODD, RA ;

WORZALA, FJ ;

TRAN, NC .

JOURNAL OF APPLIED PHYSICS, 1987, 62 (11) :4591-4596

[6] TEM-MICROSTRUCTURAL INVESTIGATIONS OF ION-BEAM MODIFIED CERAMICS WITH RESPECT TO THEIR MACROSCOPIC PROPERTIES [J].

FISCHER, W ;

WOLF, GK ;

RUOFF, H ;

KATERBAU, KH .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1993, 80-1 :1091-1096

[7] MODIFICATION OF THE MECHANICAL SURFACE-PROPERTIES AND TRIBOCHEMISTRY OF STRUCTURAL CERAMICS BY ION-BEAM TECHNIQUES [J].

FISCHER, W ;

WITUSCHEK, H ;

WOLF, GK ;

FERBER, H ;

HEINZE, R ;

WOYDT, M .

SURFACE & COATINGS TECHNOLOGY, 1993, 59 (1-3) :249-254

[8] Inherent possibilities and restrictions of plasma immersion ion implantation systems [J].

Mandl, S ;

Brutscher, J ;

Gunzel, R ;

Moller, W .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1996, 14 (04) :2701-2706

[9]

McHargue C. J., 1988, Diffusion and Defect Data - Solid State Data, Part A (Defect and Diffusion Forum), VA57-A58, P359

[10] ELECTRON-EMISSION FROM GLOW-DISCHARGE CATHODE MATERIALS DUE TO NEON AND ARGON ION-BOMBARDMENT [J].

SZAPIRO, B ;

ROCCA, JJ .

JOURNAL OF APPLIED PHYSICS, 1989, 65 (09) :3713-3716

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