Resistance switching of copper doped MoOx films for nonvolatile memory applications

被引:115
作者
Lee, Dongsoo [1 ]
Seong, Dong-jun [1 ]
Jo, Inhwa [1 ]
Xiang, F. [1 ]
Dong, R. [1 ]
Oh, Seokjoon [1 ]
Hwang, Hyunsang [1 ]
机构
[1] Gwangju Inst Sci & Technol, Dept Mat Sci & Engn, Kwangju 500712, South Korea
关键词
OXIDE;
D O I
10.1063/1.2715002
中图分类号
O59 [应用物理学];
学科分类号
摘要
Nonvolatile and reversible resistance switching of copper doped MoOx film was studied. Hysteretic-type resistive switching was observed under dc. Reproducible resistance switching over 10(6) cycles was observed under alternative voltage pulses. Two resistance states can be maintained for 25 h at 85 degrees C. The authors proved that resistance switching might be strongly related with the rupture and generation of multifilaments confirmed by spreading resistance images of a conducting atomic force microscope as well as filamentary conduction by double logarithmic plots. Based on the x-ray photoelectron spectroscopy analysis, local conducting filaments could be formed by thermally diffused copper into MoOx film from the bottom electrode. (c) 2007 American Institute of Physics.
引用
收藏
页数:3
相关论文
共 21 条
[1]   Field-driven hysteretic and reversible resistive switch at the Ag-Pr0.7Ca0.3MnO3 interface [J].
Baikalov, A ;
Wang, YQ ;
Shen, B ;
Lorenz, B ;
Tsui, S ;
Sun, YY ;
Xue, YY ;
Chu, CW .
APPLIED PHYSICS LETTERS, 2003, 83 (05) :957-959
[2]  
Bottomley LA, 1998, ANAL CHEM, V70, p425R
[3]   Direct resistance profile for an electrical pulse induced resistance change device [J].
Chen, X ;
Wu, NJ ;
Strozier, J ;
Ignatiev, A .
APPLIED PHYSICS LETTERS, 2005, 87 (23) :1-3
[4]   Scanning spreading resistance microscopy study of a metalorganic chemical vapor deposited grown InP optoelectronic structure [J].
Dixon-Warren, S ;
Lu, RP ;
Ingrey, S ;
Macquistan, D ;
Bryskiewicz, T ;
Smith, G ;
Bryskiewicz, B .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 2001, 19 (04) :1752-1757
[5]   Hysteretic current-voltage characteristics and resistance switching at an epitaxial oxide Schottky junction SrRuO3/SrTi0.99Nb0.01O3 [J].
Fujii, T ;
Kawasaki, M ;
Sawa, A ;
Akoh, H ;
Kawazoe, Y ;
Tokura, Y .
APPLIED PHYSICS LETTERS, 2005, 86 (01) :012107-1
[6]   Dynamical mean field theory with the density matrix renormalization group -: art. no. 246403 [J].
García, DJ ;
Hallberg, K ;
Rozenberg, MJ .
PHYSICAL REVIEW LETTERS, 2004, 93 (24)
[7]   BISTABLE SWITCHING IN NIOBIUM OXIDE DIODES [J].
HIATT, WR ;
HICKMOTT, TW .
APPLIED PHYSICS LETTERS, 1965, 6 (06) :106-&
[8]   Local phenomena in oxides by advanced scanning probe microscopy [J].
Kalinin, SV ;
Shao, R ;
Bonnell, DA .
JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 2005, 88 (05) :1077-1098
[9]   Resistance switching of the nonstoichiometric zirconium oxide for nonvolatile memory applications [J].
Lee, D ;
Choi, H ;
Sim, H ;
Choi, D ;
Hwang, H ;
Lee, MJ ;
Seo, SA ;
Yoo, IK .
IEEE ELECTRON DEVICE LETTERS, 2005, 26 (10) :719-721
[10]   Dual chemical role of Ag as an additive in chalcogenide glasses [J].
Mitkova, M ;
Wang, Y ;
Boolchand, P .
PHYSICAL REVIEW LETTERS, 1999, 83 (19) :3848-3851