Focused nanoparticle-beam deposition of patterned microstructures

被引：81

作者：

Di Fonzo, F

Gidwani, A

Fan, MH

Neumann, D

Iordanoglou, DI

Heberlein, JVR

McMurry, PH

Girshick, SL

Tymiak, N

Gerberich, WW

Rao, NP

机构：

[1] Univ Minnesota, Dept Mech Engn, Minneapolis, MN 55455 USA

[2] Univ Minnesota, Dept Chem Engn & Mat Sci, Minneapolis, MN 55455 USA

[3] Microtherm LLC, Minneapolis, MN 55414 USA

来源：

APPLIED PHYSICS LETTERS | 2000年 / 77卷 / 06期

关键词：

D O I：

10.1063/1.1306638

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A method was developed for fabricating nanocrystalline microstructures. This method involves synthesizing nanoparticles in a thermal plasma expanded through a nozzle, and then focusing the nanoparticles to a collimated beam by means of aerodynamic lenses. High-aspect-ratio structures of silicon carbide and titanium were deposited on stationary substrates, and lines and two-dimensional patterns were deposited on translated substrates. Linewidths equalled approximately 50 mu m. This approach allows the use of much larger nozzles than in previously developed micronozzle methods, and also allows size selection of the particles that are deposited. (C) 2000 American Institute of Physics. [S0003-6951(00)00432-0].

引用

收藏

页码：910 / 912

页数：3

相关论文

共 13 条

[1] Microstructure and electrical properties of lead zirconate titanate (Pb(Zr52/Ti48)O3) thick films deposited by aerosol deposition method [J].

Akedo, J ;

Lebedev, M .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1999, 38 (9B) :5397-5401

[2] Jet molding system for realization of three-dimensional micro-structures [J].

Akedo, J ;

Ichiki, M ;

Kikuchi, K ;

Maeda, R .

SENSORS AND ACTUATORS A-PHYSICAL, 1998, 69 (01) :106-112

[3] The effect of substrate temperature on the properties of nanostructured silicon carbide films deposited by hypersonic plasma particle deposition [J].

Blum, J. ;

Tymiak, N. ;

Neuman, A. ;

Wong, Z. ;

Rao, N. P. ;

Girshick, S. L. ;

Gerberich, W. W. ;

McMurry, P. H. ;

Heberlein, J. V. R. .

JOURNAL OF NANOPARTICLE RESEARCH, 1999, 1 (01) :31-42

[4]

DELAMORA JF, 1990, J AEROSOL SCI, V21, P169

[5] DEPOSITION OF ULTRA FINE PARTICLES USING A GAS-JET [J].

KASHU, S ;

FUCHITA, E ;

MANABE, T ;

HAYASHI, C .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1984, 23 (12) :L910-L912

[6] GENERATING PARTICLE BEAMS OF CONTROLLED DIMENSIONS AND DIVERGENCE .1. THEORY OF PARTICLE MOTION IN AERODYNAMIC LENSES AND NOZZLE EXPANSIONS [J].

LIU, P ;

ZIEMANN, PJ ;

KITTELSON, DB ;

MCMURRY, PH .

AEROSOL SCIENCE AND TECHNOLOGY, 1995, 22 (03) :293-313

[7] GENERATING PARTICLE BEAMS OF CONTROLLED DIMENSIONS AND DIVERGENCE .2. EXPERIMENTAL EVALUATION OF PARTICLE MOTION IN AERODYNAMIC LENSES AND NOZZLE EXPANSIONS [J].

LIU, P ;

ZIEMANN, PJ ;

KITTELSON, DB ;

MCMURRY, PH .

AEROSOL SCIENCE AND TECHNOLOGY, 1995, 22 (03) :314-324

[8] Thermal plasma deposition of nanostructured films [J].

Neuman, A ;

Blum, J ;

Tymiak, N ;

Wong, Z ;

Rao, NP ;

Gerberich, W ;

McMurry, PH ;

Heberlein, JVR ;

Girshick, SL .

IEEE TRANSACTIONS ON PLASMA SCIENCE, 1999, 27 (01) :46-47

[9]

ODA M, 1993, MAT RES S C, V286, P121

[10] Nanostructured materials production by hypersonic plasma particle deposition [J].

Rao, NP ;

Lee, HJ ;

Kelkar, M ;

Hansen, DJ ;

Heberlein, JVR ;

McMurry, PH ;

Girshick, SL .

NANOSTRUCTURED MATERIALS, 1997, 9 (1-8) :129-132