Study of adsorption on radiation-damaged CaF2(111) surfaces

被引:11
作者
Bermudez, VM [1 ]
机构
[1] USN, Res Lab, Washington, DC 20375 USA
关键词
X-ray photoelectron spectroscopy; electron energy loss spectroscopy; electron stimulated desorption; chemisorption; halides; surface defects;
D O I
10.1016/S0169-4332(00)00300-7
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Thin CaF2(111) films (60-130 Angstrom) have been grown in ultra-high vacuum by vapor deposition on Si(111)-(7 X 7) surfaces. Damage by low-energy (50 eV) electrons and the subsequent adsorption of small molecules (O-2, CO2, N-2, C2H6, and C2H4) have been examined using photoemission and electron energy loss spectroscopies. The damaged surface is highly reactive with O-2 and CO2. The initial rapid uptake of O saturates at exposures of less than or equal to 10 Langmuirs (L), leading to the attenuation of a damage-induced defect peak at 1.8 eV in the energy loss spectrum and the appearance of a feature indicating Ca-O banding in the surface-sensitive Ca 3p photoemission spectrum. The O Is and valence-band photoemission data indicate two distinct states of chemisorbed O differing in valence charge density. No chemisorption on the damaged surface is seen for less than or equal to 10(3) L of N-2, or less than or equal to 300 L of C2H6. For C2H4, deposition of C is shown by the appearance of the C Is in photoemission and of the 6.6 eV energy loss peak characteristic of graphitic C. O Published by Elsevier Science B.V.
引用
收藏
页码:227 / 239
页数:13
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共 70 条
  • [1] CORE BINDING-ENERGY SHIFTS FOR FREE NEGATIVE-IONS OF OXYGEN - O-DEGREES TO O2-
    BAGUS, PS
    BAUSCHLICHER, CW
    [J]. JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1980, 20 (03) : 183 - 190
  • [2] ELECTRON-BEAM-INDUCED DECOMPOSITION AND OXIDATION OF THIN CAF2-LAYERS ON SI(111) STUDIED BY AUGER-ELECTRON SPECTROSCOPY
    BAUNACK, S
    ZEHE, A
    [J]. SURFACE SCIENCE, 1990, 225 (03) : 292 - 300
  • [3] ELECTRON-BEAM EFFECTS DUE TO BOMBARDMENT OF CAF2 LAYERS INVESTIGATED BY AUGER-ELECTRON SPECTROSCOPY
    BAUNACK, S
    LANDGRAF, S
    ZEHE, A
    [J]. PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1990, 118 (01): : 203 - 207
  • [4] Force microscopy of cleaved and electron-irradiated CaF2(111) surfaces in ultra-high vacuum
    Bennewitz, R
    Reichling, M
    Matthias, E
    [J]. SURFACE SCIENCE, 1997, 387 (1-3) : 69 - 77
  • [5] Bulk and surface processes in low-energy-electron-induced decomposition of CaF2
    Bennewitz, R
    Smith, D
    Reichling, M
    [J]. PHYSICAL REVIEW B, 1999, 59 (12): : 8237 - 8246
  • [6] ELECTRON-STIMULATED DESORPTION FROM CAF2 - PENETRATION DEPTH OF ELECTRONS AND SAMPLE CHARGING
    BENNEWITZ, R
    SMITH, D
    REICHLING, M
    MATTHIAS, E
    ITOH, N
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1995, 101 (1-2) : 118 - 121
  • [8] CHARACTERIZATION OF A ZR M-XI (HV=151.6 EV) SOURCE FOR SOFT-X-RAY PHOTOEMISSION SPECTROSCOPY
    BERMUDEZ, VM
    [J]. JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1995, 73 (03) : 249 - 259
  • [9] Lithography with 157 nm lasers
    Bloomstein, TM
    Horn, MW
    Rothschild, M
    Kunz, RR
    Palmacci, ST
    Goodman, RB
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1997, 15 (06): : 2112 - 2116
  • [10] Critical issues in 157 nm lithography
    Bloomstein, TM
    Rothschild, M
    Kunz, RR
    Hardy, DE
    Goodman, RB
    Palmacci, ST
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1998, 16 (06): : 3154 - 3157