VACUUM ULTRAVIOLET RADIATION-DAMAGE OF KCI SURFACE - APPLICATION OF COMBINED SPECTROSCOPIC ELLIPSOMETRY AND REFLECTOMETRY

被引：20

作者：

BERMUDEZ, VM

机构：

来源：

SURFACE SCIENCE | 1978年 / 74卷 / 03期

关键词：

D O I：

10.1016/0039-6028(78)90015-8

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

收藏

页码：568 / 594

页数：27

相关论文

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[J]. APPLIED OPTICS, 1978, 17 (04) : 542 - 552
[9] EFFECT OF SAMPLE IMPERFECTIONS IN WAVELENGTH-SCANNING POLARIZATION-MODULATION ELLIPSOMETRY
BERMUDEZ, VM
[J]. OPTICS COMMUNICATIONS, 1977, 23 (03) : 413 - 418
[10] ELLIPS - FORTRAN SIMULATION OF A POLARIZATION-MODULATION ELLIPSOMETER
BERMUDEZ, VM
[J]. COMPUTER PHYSICS COMMUNICATIONS, 1977, 13 (03) : 207 - 224

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