ELLIPS - FORTRAN SIMULATION OF A POLARIZATION-MODULATION ELLIPSOMETER

被引：8

作者：

BERMUDEZ, VM ^{[1
]}

机构：

[1] USN,RES LAB,WASHINGTON,DC 20375

来源：

COMPUTER PHYSICS COMMUNICATIONS | 1977年 / 13卷 / 03期

关键词：

D O I：

10.1016/0010-4655(77)90015-7

中图分类号：

TP39 [计算机的应用];

学科分类号：

081203 ; 0835 ;

摘要：

引用

页码：207 / 224

页数：18

共 19 条

[1] MEASUREMENT AND CORRECTION OF FIRST-ORDER ERRORS IN ELLIPSOMETRY
ASPNES, DE
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1971, 61 (08) : 1077 - &
[2] OPTIMIZING PRECISION OF ROTATING-ANALYZER ELLIPSOMETERS
ASPNES, DE
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1974, 64 (05) : 639 - 646
[3] EFFECTS OF COMPONENT OPTICAL-ACTIVITY IN DATA REDUCTION AND CALIBRATION OF ROTATING-ANALYZER ELLIPSOMETERS
ASPNES, DE
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1974, 64 (06) : 812 - 819
[4] UNIFIED ANALYSIS OF ELLIPSOMETRY ERRORS DUE TO IMPERFECT COMPONENTS, CELL-WINDOW BIREFRINGENCE, AND INCORRECT AZIMUTH ANGLES
AZZAM, RMA
BASHARA, NM
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1971, 61 (05) : 600 - &
[5] ELLIPSOMETRY WITH IMPERFECT COMPONENTS INCLUDING INCOHERENT EFFECTS
AZZAM, RMA
BASHARA, NM
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1971, 61 (10) : 1380 - &
[6] CALIBRATION OF ELLIPSOMETER DIVIDED CIRCLES
AZZAM, RMA
BASHARA, NM
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1971, 61 (08) : 1118 - &
[7] GENERAL TREATMENT OF EFFECT OF CELL WINDOWS IN ELLIPSOMETRY
AZZAM, RMA
BASHARA, NM
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1971, 61 (06) : 773 - &
[8] EFFECTS OF COMPONENT IMPERFECTIONS ON ELLIPSOMETER CALIBRATION
HUNTER, WR
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1973, 63 (08) : 951 - 957
[9] AN IMPROVED METHOD FOR HIGH REFLECTIVITY ELLIPSOMETRY BASED ON A NEW POLARIZATION MODULATION TECHNIQUE
JASPERSON, SN
SCHNATTERLY, SE
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1969, 40 (06) : 761 - +
[10] MODULATED ELLIPSOMETER FOR STUDYING THIN-FILM OPTICAL PROPERTIES AND SURFACE DYNAMICS
JASPERSON, SN
BURGE, DK
OHANDLEY, RC
[J]. SURFACE SCIENCE, 1973, 37 (01) : 548 - 558

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