Incubation: Subthreshold ablation of poly-(methyl methacrylate) and the nature of the decomposition pathways

被引:43
作者
Blanchet, GB [1 ]
Cotts, P [1 ]
Fincher, CR [1 ]
机构
[1] Dupont Co, Cent Res Dept, Wilmington, DE 19898 USA
关键词
D O I
10.1063/1.1288501
中图分类号
O59 [应用物理学];
学科分类号
摘要
A study of the decomposition of poly-(methyl methacrylate) (PMMA) by pulsed UV laser ablation in the incubation regime is presented here. We propose that incubation proceeds via the photoinduced formation of defects centers; while ablation following incubation, at subthreshold fluences, is a thermally driven phenomena. The light scattering data, in the incubation regime, is consistent with molecular weight reduction via backbone cleavage. The defect centers, C=C at chain ends following backbone cleavage, increase the UV absorption coefficient thereby lowering the ablation threshold. Similarities between the mass spectra of ablative PMMA following incubation and pyrolysis suggest that ablation following incubation is thermally driven. The implications of these results in an extensive and contradictory body of available data are discussed. (C) 2000 American Institute of Physics. [S0021-8979(00)05018-0].
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收藏
页码:2975 / 2978
页数:4
相关论文
共 31 条
[1]   DIRECT ETCHING OF POLYMERIC MATERIALS USING A XECL LASER [J].
ANDREW, JE ;
DYER, PE ;
FORSTER, D ;
KEY, PH .
APPLIED PHYSICS LETTERS, 1983, 43 (08) :717-719
[2]   DEPOSITION OF POLY(METHYL METHACRYLATE) FILMS BY UV LASER-ABLATION [J].
BLANCHET, GB .
MACROMOLECULES, 1995, 28 (13) :4603-4607
[3]   DEPOSITION OF AMORPHOUS FLUOROPOLYMERS THIN-FILMS BY LASER ABLATION [J].
BLANCHET, GB .
APPLIED PHYSICS LETTERS, 1993, 62 (05) :479-481
[4]   DEPOSITION OF POLYTETRAFLUOROETHYLENE FILMS BY LASER ABLATION [J].
BLANCHET, GB ;
SHAH, SI .
APPLIED PHYSICS LETTERS, 1993, 62 (09) :1026-1028
[5]   LASER-ABLATION AND THE PRODUCTION OF POLYMER-FILMS [J].
BLANCHET, GB ;
FINCHER, CR ;
JACKSON, CL ;
SHAH, SI ;
GARDNER, KH .
SCIENCE, 1993, 262 (5134) :719-721
[6]   THIN-FILM FABRICATION BY LASER-ABLATION OF ADDITION POLYMERS [J].
BLANCHET, GB ;
FINCHER, CR .
ADVANCED MATERIALS, 1994, 6 (11) :881-887
[7]   EXCIMER LASER ETCHING OF POLYIMIDE [J].
BRANNON, JH ;
LANKARD, JR ;
BAISE, AI ;
BURNS, F ;
KAUFMAN, J .
JOURNAL OF APPLIED PHYSICS, 1985, 58 (05) :2036-2043
[8]   MASS SPECTROSCOPIC IDENTIFICATION OF WAVELENGTH DEPENDENT UV LASER PHOTOABLATION FRAGMENTS FROM POLYMETHYLMETHACRYLATE [J].
ESTLER, RC ;
NOGAR, NS .
APPLIED PHYSICS LETTERS, 1986, 49 (18) :1175-1177
[9]  
JELLINEK HHG, 1984, J PHYS CHEM-US, V88, P3048, DOI 10.1021/j150658a024
[10]   Incubation and photoablation of poly(methyl methacrylate) at 248 nm. New insight into the reaction mechanism using photofragment translational spectroscopy [J].
Krajnovich, DJ .
JOURNAL OF PHYSICAL CHEMISTRY A, 1997, 101 (11) :2033-2039