High-resolution potential mapping in semiconductor nanostructures by cross-sectional scanning tunneling microscopy and spectroscopy

被引:13
作者
Modesti, S
Furlanetto, D
Piccin, M
Rubini, S
Franciosi, A
机构
[1] INFM, Lab Nazl TASC, I-34012 Trieste, Italy
[2] Univ Trieste, Dipartimento Fis, I-34127 Trieste, Italy
关键词
D O I
10.1063/1.1563310
中图分类号
O59 [应用物理学];
学科分类号
摘要
Using a combination of scanning tunneling microscopy and spectroscopy techniques, and a series of periodic delta-doped structures in GaAs, we show that the electrostatic potential can be mapped along {110} cross sections in semiconductor nanostructures with nanometer resolution and 30 meV sensitivity. Our results also indicate that microscopic capacitors with plates spaced by as little as 2 nm can be implemented by delta doping for band gap engineering purposes. (C) 2003 American Institute of Physics.
引用
收藏
页码:1932 / 1934
页数:3
相关论文
共 21 条
[11]   BE DELTA-DOPED LAYERS IN GAAS IMAGED WITH ATOMIC-RESOLUTION USING SCANNING-TUNNELING-MICROSCOPY [J].
JOHNSON, MB ;
KOENRAAD, PM ;
VANDERVLEUTEN, WC ;
SALEMINK, HWM ;
WOLTER, H .
PHYSICAL REVIEW LETTERS, 1995, 75 (08) :1606-1609
[12]   Electric force microscopy as a probe of active and passive elements of integrated circuits [J].
Karpov, I ;
Belcher, RW ;
Linn, JH .
APPLIED SURFACE SCIENCE, 1998, 125 (3-4) :332-338
[13]   High resolution imaging of contact potential difference using a novel ultrahigh vacuum non-contact atomic force microscope technique [J].
Kitamura, S ;
Suzuki, K ;
Iwatsuki, M .
APPLIED SURFACE SCIENCE, 1999, 140 (3-4) :265-270
[14]   TUNNELING MICROSCOPY OF POINT-DEFECTS ON GAAS(110) [J].
LENGEL, G ;
WILKINS, R ;
BROWN, G ;
WEIMER, M .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1993, 11 (04) :1472-1476
[15]  
MODESTI S, UNPUB
[16]   SCANNING TUNNELING MICROSCOPY AND POTENTIOMETRY ON A SEMICONDUCTOR HETEROJUNCTION [J].
MURALT, P ;
MEIER, H ;
POHL, DW ;
SALEMINK, HWM .
APPLIED PHYSICS LETTERS, 1987, 50 (19) :1352-1354
[17]   SCANNING TUNNELING POTENTIOMETRY [J].
MURALT, P ;
POHL, DW .
APPLIED PHYSICS LETTERS, 1986, 48 (08) :514-516
[18]   KELVIN PROBE FORCE MICROSCOPY [J].
NONNENMACHER, M ;
OBOYLE, MP ;
WICKRAMASINGHE, HK .
APPLIED PHYSICS LETTERS, 1991, 58 (25) :2921-2923
[19]   Two-dimensional mapping of the electrostatic potential in transistors by electron holography [J].
Rau, WD ;
Schwander, P ;
Baumann, FH ;
Höppner, W ;
Ourmazd, A .
PHYSICAL REVIEW LETTERS, 1999, 82 (12) :2614-2617
[20]   TUNNELING SPECTROSCOPY ACROSS GAAS/ALXGA1-XAS INTERFACES AT NANOMETER RESOLUTION [J].
SALEMINK, HWM ;
ALBREKTSEN, O ;
KOENRAAD, P .
PHYSICAL REVIEW B, 1992, 45 (12) :6946-6949