Self-organized CdSe quantum dots on (100)ZnSe/GaAs surfaces grown by metalorganic molecular beam epitaxy

被引:24
作者
Arita, M [1 ]
Avramescu, A
Uesugi, K
Suemune, I
Numai, T
Machida, H
Shimoyama, N
机构
[1] Hokkaido Univ, Res Inst Elect Sci, Sapporo, Hokkaido 060, Japan
[2] Trichem Lab Inc, Yamanashi 40901, Japan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 1997年 / 36卷 / 6B期
关键词
CdSe; II-VI quantum dot; ZnSe/GaAs heteroepitaxial growth; atomically flat GaAs surface; TDMAAs; Stranski-Krastanov growth mode; MOMBE;
D O I
10.1143/JJAP.36.4097
中图分类号
O59 [应用物理学];
学科分类号
摘要
II-VI semiconductor low-dimensional structures, quantum dots, have been grown on GaAs substrates by metalorganic molecular beam epitaxy (MOMBE). Before the heteroepitaxial growth, atomically flat, As-stabilized GaAs surfaces were prepared by high-temperature As cleaning using tris-dimethylamino-arsenic (TDMAAs). CdSe thin films deposited on (100)ZnSe/GaAs surfaces have been investigated with atomic force microscopy (AFM) and were found to form three-dimensional islands with rather uniform size distribution. A large mismatch (similar to 7%) of lattice constants between CdSe and ZnSe pseudomorphically grown on GaAs possibly results in the Stranski-Krastanov growth mode. CdSe quantum dots with a diameter of 97 +/- 11 nm were successfully formed at 350 degrees C.
引用
收藏
页码:4097 / 4101
页数:5
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