Electromigration in integrated circuits

被引:33
作者
Malone, DW [1 ]
Hummel, RE [1 ]
机构
[1] UNIV FLORIDA,DEPT MAT SCI & ENGN,GAINESVILLE,FL 32611
关键词
integrated circuit; electromigration; reliability; thin films; microelectronics;
D O I
10.1080/10408439708241261
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We review the mechanism of integrated circuit failure known as ''electromigration.'' Electromigration is a physical wearout process that operates primarily in the on-chip interconnections of an integrated circuit. It is caused by the currents that run through those interconnections. The first part of the review introduces the founding principles of electromigration and the research history upon which those principles are based. The second part introduces and reviews the increasingly relevant issue of pulsed current electromigration, and the final part contains a relatively detailed review of a recent study of pulsed current electromigration.
引用
收藏
页码:199 / 238
页数:40
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