High detectivity InGaN-GaN multiquantum well p-n junction photodiodes

被引:71
作者
Chiou, YZ [1 ]
Su, YK
Chang, SJ
Gong, J
Lin, YC
Liu, SH
Chang, CS
机构
[1] Natl Cheng Kung Univ, Inst Microelect, Tainan 70101, Taiwan
[2] Natl Cheng Kung Univ, Dept Elect Engn, Tainan 70101, Taiwan
[3] Natl Tsing Hua Univ, Inst Elect Engn, Hsinchu 30055, Taiwan
关键词
GaN; multiquantum well (MQW); noise; photodiode; p-n junction; 1/f;
D O I
10.1109/JQE.2003.810262
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
InGaN-GaN multiquantum well (MQW) p-n junction photodiodes with semi-transparent Ni-Au electrodes were fabricated and characterized. It was found that the fabricated InGaN-GaN p-n junction photodiodes exhibit a 20-V breakdown voltage and a photocurrent to dark current contrast ratio of similar to 10(5) when a 0.4-V reverse bias was applied. The peak responsivity at 380 nm was 1.28 and 1.76 A/W with a 0.1- and 3-V applied reverse bias, respectively. Furthermore, an internal gain was found from our InGaN-GaN MQW p-n junction photodiodes possibly due to the long-lifetime of GaN based materials. Also, it was found that the low frequency poise of our photodiodes; was dominated by the 1/f type noise. For a given bandwidth of 500 Hz, the corresponding noise equivalent power and normalized detectivity D* were found to be 6.34 x 10(-13) W and x 10(11) cm (.) Hz(0.5) W-1, respectively.
引用
收藏
页码:681 / 685
页数:5
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