X-ray photoemission study of CoFeB/MgO thin film bilayers

被引：87

作者：

Read, J. C. ^{[1
]}

Mather, P. G. ^{[1
]}

Buhrman, R. A. ^{[1
]}

机构：

[1] Cornell Univ, Sch Appl & Engn Phys, Ithaca, NY 14853 USA

来源：

APPLIED PHYSICS LETTERS | 2007年 / 90卷 / 13期

基金：

美国国家科学基金会;

关键词：

D O I：

10.1063/1.2717091

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The authors present results from an x-ray photoemission spectroscopy study of CoFeB/MgO bilayers where they observe process-dependent formation of B, Fe, and Co oxides at the CoFeB/MgO interface due to oxidation of CoFeB during MgO deposition. Vacuum annealing reduces the Co and Fe oxides but further incorporates B into the MgO forming a composite MgBxOy layer. Inserting an Mg layer between CoFeB and MgO introduces an oxygen sink, providing increased control over B content in the barrier. (c) 2007 American Institute of Physics.

引用

页数：3

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