Silicon nanowires: Diameter dependence of growth rate and delay in growth
被引:58
作者:
Dhalluin, F.
论文数: 0引用数: 0
h-index: 0
机构:
CNRS, CEA Grenoble, Lab Technol Microelect, UMR 5129, F-38054 Grenoble, FranceCNRS, CEA Grenoble, Lab Technol Microelect, UMR 5129, F-38054 Grenoble, France
Dhalluin, F.
[1
]
Baron, T.
论文数: 0引用数: 0
h-index: 0
机构:
CNRS, CEA Grenoble, Lab Technol Microelect, UMR 5129, F-38054 Grenoble, FranceCNRS, CEA Grenoble, Lab Technol Microelect, UMR 5129, F-38054 Grenoble, France
Baron, T.
[1
]
Ferret, P.
论文数: 0引用数: 0
h-index: 0
机构:
MINATEC, LETI, CEA, F-38054 Grenoble, FranceCNRS, CEA Grenoble, Lab Technol Microelect, UMR 5129, F-38054 Grenoble, France
Ferret, P.
[2
]
Salem, B.
论文数: 0引用数: 0
h-index: 0
机构:
CNRS, CEA Grenoble, Lab Technol Microelect, UMR 5129, F-38054 Grenoble, FranceCNRS, CEA Grenoble, Lab Technol Microelect, UMR 5129, F-38054 Grenoble, France
Salem, B.
[1
]
Gentile, P.
论文数: 0引用数: 0
h-index: 0
机构:
MINATEC, SiNaPS, INAC, CEA, F-38054 Grenoble, FranceCNRS, CEA Grenoble, Lab Technol Microelect, UMR 5129, F-38054 Grenoble, France
Gentile, P.
[3
]
Harmand, J. -C.
论文数: 0引用数: 0
h-index: 0
机构:
CNRS, Lab Photon & Nanostruct, F-91460 Marcoussis, FranceCNRS, CEA Grenoble, Lab Technol Microelect, UMR 5129, F-38054 Grenoble, France
Harmand, J. -C.
[4
]
机构:
[1] CNRS, CEA Grenoble, Lab Technol Microelect, UMR 5129, F-38054 Grenoble, France
[2] MINATEC, LETI, CEA, F-38054 Grenoble, France
[3] MINATEC, SiNaPS, INAC, CEA, F-38054 Grenoble, France
[4] CNRS, Lab Photon & Nanostruct, F-91460 Marcoussis, France
We grew Si nanowires by chemical vapor deposition, via the vapor liquid solid growth, using silane as gaseous precursor and gold as catalyst. The results show that the nanowire length depends on their diameter. For nanowires with diameter under 100 nm, the length increases when diameter increases, because of an increase in the growth velocity. For the thicker diameter (d>100 nm), length decreases when diameter increases, due to an apparent incubation time which is all the higher as the diameter is high. We propose a semiempirical model combining Gibbs-Thomson effect and incubation time, which shows good agreement with the experimental data.