Proposals for producing novel periodic structures by ion bombardment sputtering

被引：14

作者：

Carter, G ^{[1
]}

机构：

[1] Univ Salford, Inst Mat, Joule Phys Lab, Salford M5 4WT, Lancs, England

来源：

VACUUM | 2004年 / 77卷 / 01期

关键词：

sputtering; multiple ion fluxes; superimposed ripple patterns; rotating targets; circular ripple patterns;

D O I：

10.1016/j.vacuum.2004.07.082

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

It is proposed, and confirmed analytically that if multiple ion fluxes are incident simultaneously, all at the same oblique polar angle but at different azimuthal angles, on to a target then the individual ripple patterns generated by sputtering are superimposed to produce novel Surface structures. It is also shown that single focused ion fluxes incident on to rotating targets can produce circular ripple patterns. (C) 2004 Published by Elsevier Ltd.

引用

页码：97 / 100

页数：4

共 35 条

[1] PREDICTION OF ION-BOMBARDED SURFACE TOPOGRAPHIES USING FRANKS KINEMATIC THEORY OF CRYSTAL DISSOLUTION [J].

BARBER, DJ ;

FRANK, FC ;

MOSS, M ;

STEEDS, JW ;

TSONG, IST .

JOURNAL OF MATERIALS SCIENCE, 1973, 8 (07) :1030-1040

[2] Theory of improved resolution in depth profiling with sample rotation [J].

Bradley, RM ;

Cirlin, EH .

APPLIED PHYSICS LETTERS, 1996, 68 (26) :3722-3724

[3] THEORY OF RIPPLE TOPOGRAPHY INDUCED BY ION-BOMBARDMENT [J].

BRADLEY, RM ;

HARPER, JME .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (04) :2390-2395

[4] SURFACE-MORPHOLOGY EVOLUTION OF SPUTTERED, MOVING SUBSTRATES [J].

CARTER, G ;

NOBES, MJ ;

CRUZ, SA .

JOURNAL OF MATERIALS SCIENCE LETTERS, 1984, 3 (06) :523-527

[5] A 2ND-ORDER EROSION SLOWNESS THEORY OF THE DEVELOPMENT OF SURFACE-TOPOGRAPHY BY ION-INDUCED SPUTTERING [J].

CARTER, G ;

NOBES, MJ ;

WEBB, RP .

JOURNAL OF MATERIALS SCIENCE, 1981, 16 (08) :2091-2102

[6] INFLUENCE OF SURFACE-DIFFUSION ON TOPOGRAPHY DEVELOPMENT OF AN AMORPHOUS SOLID DURING SPUTTERING [J].

CARTER, G .

JOURNAL OF MATERIALS SCIENCE, 1976, 11 (06) :1091-1098

[7] The physics and applications of ion beam erosion [J].

Carter, G .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2001, 34 (03) :R1-R22

[8] THE EFFECTS OF ION SPECIES AND TARGET TEMPERATURE ON TOPOGRAPHY DEVELOPMENT ON ION-BOMBARDED SI [J].

CARTER, G ;

VISHNYAKOV, V ;

MARTYNENKO, YV ;

NOBES, MJ .

JOURNAL OF APPLIED PHYSICS, 1995, 78 (06) :3559-3565

[9]

CARTER G, 1977, RADIAT EFF, V65, P33

[10] Is ion sputtering always a "Negative Homoepitaxial Deposition"? [J].

Costantini, G ;

de Mongeot, EB ;

Boragno, C ;

Valbusa, U .

PHYSICAL REVIEW LETTERS, 2001, 86 (05) :838-841

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