Correlating structural and resistive changes in Ti:NiO resistive memory elements

被引:18
作者
Heinonen, O. [1 ]
Siegert, M. [1 ]
Roelofs, A. [1 ]
Petford-Long, A. K. [2 ]
Holt, M. [3 ]
d'Aquila, K. [2 ,4 ]
Li, W. [2 ]
机构
[1] Seagate Technol, Memory Prod Grp, Bloomington, MN 55435 USA
[2] Argonne Natl Lab, Div Mat Sci, Argonne, IL 60439 USA
[3] Argonne Natl Lab, Ctr Nanoscale Mat, Argonne, IL 60439 USA
[4] Northwestern Univ, Dept Mat Sci & Engn, Evanston, IL 60208 USA
关键词
RANDOM-ACCESS MEMORY; TRANSITION-METAL OXIDES; NIO FILMS; RESISTANCE;
D O I
10.1063/1.3355546
中图分类号
O59 [应用物理学];
学科分类号
摘要
Structural and resistive changes in Ti-doped NiO resistive random access memory structures that occur upon electroforming have been investigated using hard x-ray microscopy. Electroforming leads to structural changes in regions of size up to about one micrometer, much larger than the grain size of the structure. Such changes are consistent with a migration of ionic species or defects during electroforming over regions containing many crystalline grains. (C) 2010 American Institute of Physics. [doi: 10.1063/1.3355546]
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页数:3
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