IR laser-induced decomposition of prop-2-enylsilane and ethynylsilane for chemical vapour deposition of Si/C phases

被引：10

作者：

Pola, J

Vitek, J

Bastl, Z

Urbanova, M

Subrt, J

Taylor, R

机构：

[1] ACAD SCI CZECH REPUBL,J HEYROVSKY INST PHYS CHEM & ELECTROCHEM,CR-18223 PRAGUE,CZECH REPUBLIC

[2] ACAD SCI CZECH REPUBL,INST INORGAN CHEM,CZ-25068 PRAGUE,CZECH REPUBLIC

[3] UNIV SUSSEX,SCH CHEM PHYS & ENVIRONM SCI,BRIGHTON BN1 9QJ,E SUSSEX,ENGLAND

来源：

JOURNAL OF MATERIALS CHEMISTRY | 1997年 / 7卷 / 08期

关键词：

D O I：

10.1039/a700370f

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

IR multiphoton decomposition of prop-2-enylsilane affords a solid material consisting of an Si/C/H polymer and SIG, while that of ethenylsilane produces a solid material consisting almost exclusively of SiC.

引用

页码：1415 / 1420

页数：6

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