Absence of defect state creation in nanocrystalline silicon thin film transistors deduced from constant current stress measurements

被引:17
作者
Esmaeili-Rad, Mohammad R. [1 ]
Sazonov, Andrei
Nathan, Arokia
机构
[1] Univ Waterloo, Dept Elect & Comp Engn, Waterloo, ON N2L 3G1, Canada
[2] UCL, London Ctr Nanotechnol, London WC1H 0AH, England
基金
加拿大自然科学与工程研究理事会;
关键词
D O I
10.1063/1.2783971
中图分类号
O59 [应用物理学];
学科分类号
摘要
The authors discuss time and temperature dependences of the shift in threshold voltage (Delta V-T) of nanocrystalline silicon (nc-Si) thin film transistors (TFTs) stressed at constant drain currents. In contrast to the behavior of the hydrogenated amorphous silicon (a-Si:H) counterpart, a weak temperature dependence of Delta V-T was observed. The results follow the charge trapping model and the predicted stretched-exponential time dependence that saturates at prolonged stress times. In addition, Delta V-T does not fit into the thermalization energy concept that was developed based on the defect state creation model for a-Si:H TFTs. The results indicate absence of defect state creation in nc-Si TFTs.
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页数:3
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