GaN Schottky barrier photodetectors with a low-temperature GaN cap layer

被引:49
作者
Lee, ML [1 ]
Sheu, JK
Lai, WC
Chang, SJ
Su, YK
Chen, MG
Kao, CJ
Chi, GC
Tsai, JM
机构
[1] Natl Cheng Kung Univ, Inst Microelect, Tainan 70101, Taiwan
[2] Natl Cheng Kung Univ, Dept Elect Engn, Tainan 70101, Taiwan
[3] Natl Cent Univ, Dept Phys, Chungli 320, Taiwan
[4] S Epitaxy Corp, Hsin Shi 744, Taiwan
关键词
D O I
10.1063/1.1570519
中图分类号
O59 [应用物理学];
学科分类号
摘要
By using organometallic vapor phase epitaxy, we have prepared i-GaN/low-temperature (LT) GaN/Ni/Au (sample A) and i-GaN/Ni/Au (sample B) Schottky barrier UV photodiodes (PDs). It was found that we could significantly reduce the leakage current and achieve a much larger photocurrent to dark current contrast ratio by introducing a LT GaN on top of the conventional nitride-based UV PDs. With incident light wavelength of 350 nm and a -1 V reverse bias, it was found that the measured responsivity was around 0.1 and 0.37 A/W for samples A and B, respectively. Furthermore, it was found that the operation speed of sample A is slower than that of sample B due to the highly resistive LT-GaN layer induced large RC time constant. (C) 2003 American Institute of Physics.
引用
收藏
页码:2913 / 2915
页数:3
相关论文
共 21 条
[11]   High-quality visible-blind AlGaN p-i-n photodiodes [J].
Monroy, E ;
Hamilton, M ;
Walker, D ;
Kung, P ;
Sánchez, FJ ;
Razeghi, M .
APPLIED PHYSICS LETTERS, 1999, 74 (08) :1171-1173
[12]   Low noise p-pi-n GaN ultraviolet photodetectors [J].
Osinsky, A ;
Gangopadhyay, S ;
Gaska, R ;
Williams, B ;
Khan, MA ;
Kuksenkov, D ;
Temkin, H .
APPLIED PHYSICS LETTERS, 1997, 71 (16) :2334-2336
[13]  
PANKOVE JI, 1990, MATER RES SOC SYMP P, V162, P515
[14]   High-performance (Al,Ga)N-based solar-blind ultraviolet p-i-n detectors on laterally epitaxially overgrown GaN [J].
Parish, G ;
Keller, S ;
Kozodoy, P ;
Ibbetson, JP ;
Marchand, H ;
Fini, PT ;
Fleischer, SB ;
DenBaars, SP ;
Mishra, UK ;
Tarsa, EJ .
APPLIED PHYSICS LETTERS, 1999, 75 (02) :247-249
[15]   Investigation of the mechanism for Ti/Al ohmic contact on etched n-GaN surfaces [J].
Sheu, JK ;
Su, YK ;
Chi, GC ;
Jou, MJ ;
Liu, CC ;
Chang, CM ;
Hung, WC ;
Bow, JS ;
Yu, YC .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2000, 18 (02) :729-732
[16]   Inductively coupled plasma etching of GaN using Cl2/Ar and Cl2/N2 gases [J].
Sheu, JK ;
Su, YK ;
Chi, GC ;
Jou, MJ ;
Liu, CC ;
Chang, CM ;
Hung, WC .
JOURNAL OF APPLIED PHYSICS, 1999, 85 (03) :1970-1974
[17]   Effects of thermal annealing on the indium tin oxide Schottky contacts of n-GaN [J].
Sheu, JK ;
Su, YK ;
Chi, GC ;
Jou, MJ ;
Chang, CM .
APPLIED PHYSICS LETTERS, 1998, 72 (25) :3317-3319
[18]  
SHEU JK, IN PRESS J ELECT MAT
[19]   High-speed, low-noise metal-semiconductor-metal ultraviolet photodetectors based on GaN [J].
Walker, D ;
Monroy, E ;
Kung, P ;
Wu, J ;
Hamilton, M ;
Sanchez, FJ ;
Diaz, J ;
Razeghi, M .
APPLIED PHYSICS LETTERS, 1999, 74 (05) :762-764
[20]   High barrier height GaN Schottky diodes: Pt/GaN and Pd/GaN [J].
Wang, L ;
Nathan, MI ;
Lim, TH ;
Khan, MA ;
Chen, Q .
APPLIED PHYSICS LETTERS, 1996, 68 (09) :1267-1269