Visible photoluminescence from nanostructured Si-based layers produced by air optical breakdown on silicon

被引：50

作者：

Kabashin, AV ^{[1
]}

Meunier, M ^{[1
]}

机构：

[1] Ecole Polytech, Dept Engn Phys, Laser Proc Lab, Montreal, PQ H3C 3A7, Canada

来源：

APPLIED PHYSICS LETTERS | 2003年 / 82卷 / 10期

关键词：

D O I：

10.1063/1.1557752

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Pulsed radiation of CO2 laser has been used to produce an optical breakdown on a silicon target in atmospheric air. After several breakdown initiations near the threshold of plasma production, a highly porous layer was formed under the radiation spot on the silicon surface. The fabricated layers presented the porosity of 75%-80% and were formed of silicon nanocrystals imbedded in SiO2 matrix. They exhibited strong photoluminescence (PL) around 2.0 eV, which was stable to a prolonged continuous illumination of samples. Possible mechanisms of nanostructure formation and PL origin are discussed. (C) 2003 American Institute of Physics.

引用

页码：1619 / 1621

页数：3

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