Deposition of MgO thin films by modified electrostatic spray pyrolysis method

被引：41

作者：

Kim, SG ^{[1
]}

Kim, JY ^{[1
]}

Kim, HJ ^{[1
]}

机构：

[1] Seoul Natl Univ, Sch Mat Sci & Engn, Seoul 151742, South Korea

来源：

THIN SOLID FILMS | 2000年 / 376卷 / 1-2期

关键词：

magnesium oxide; electrostatic spray pyrolysis; guide; extraction electrode;

D O I：

10.1016/S0040-6090(00)01186-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

MgO thin films were deposited on SiO2/Si(100) substrates by a modified electrostatic spray pyrolysis (ESP) method using Mg(tmhd)(2) as a precursor source. In this modified ESP system, a guide, guide heaters, and an extraction electrode were added to the conventional ESP system, which has been widely used to synthesize sub-micrometer and nano-sized particles of oxidic materials. The growth rates of the films were changed from 34 to 87 Angstrom /min depending on the substrate and the guide temperature. The MgO films deposited at temperatures as low as 400-500 degreesC exhibited a (100)-preferred orientation even without a post-annealing treatment. No impurities were incorporated in the films within the detection limit of X-ray photoelectron spectroscopy analysis. (C) 2000 Elsevier Science S.A. All rights reserved.

引用

页码：110 / 114

页数：5

共 16 条

[1] INSTABILITY OF EVAPORATING CHARGED DROPS [J].

ABBAS, MA ;

LATHAM, J .

JOURNAL OF FLUID MECHANICS, 1967, 30 :663-&

[2] Morphology control of thin LiCoO2 films fabricated using the electrostatic spray deposition (ESD) technique [J].

Chen, CH ;

Kelder, EM ;

vanderPut, PJJM ;

Schoonman, J .

JOURNAL OF MATERIALS CHEMISTRY, 1996, 6 (05) :765-771

[3] ELECTROHYDRODYNAMIC SPRAYING FUNCTIONING MODES - A CRITICAL-REVIEW [J].

CLOUPEAU, M ;

PRUNETFOCH, B .

JOURNAL OF AEROSOL SCIENCE, 1994, 25 (06) :1021-1036

[4] DEPOSITION OF (100) ORIENTED MGO THIN-FILMS ON SAPPHIRE BY A SPRAY PYROLYSIS METHOD [J].

DESISTO, WJ ;

HENRY, RL .

APPLIED PHYSICS LETTERS, 1990, 56 (25) :2522-2523

[5]

FORK DK, 1991, APPL PHYS LETT, V58, P2994

[6] SrBi2Ta2O9(SBT) thin films prepared by electrostatic spray [J].

Han, JP ;

Gu, J ;

Ma, TP .

INTEGRATED FERROELECTRICS, 1997, 14 (1-4) :229-235

[7]

Hinds W.C., 1982, Aerosol Technology

[8]

*JOINT COMM POWD D, 1967, 30794 JOINT COMM POW

[9] METALORGANIC CHEMICAL VAPOR-DEPOSITION OF [100] TEXTURED MGO THIN-FILMS [J].

KWAK, BS ;

BOYD, EP ;

ZHANG, K ;

ERBIL, A ;

WILKINS, B .

APPLIED PHYSICS LETTERS, 1989, 54 (25) :2542-2544

[10] Preparation and crystallographic characterizations of highly oriented Pb(Zr0.52Ti0.48)O-3 films and MgO buffer layers on (100)GaAs and (100)Si by pulsed laser ablation [J].

Masuda, A ;

Yamanaka, Y ;

Tazoe, M ;

Nakamura, T ;

Morimoto, A ;

Shimizu, T .

JOURNAL OF CRYSTAL GROWTH, 1996, 158 (1-2) :84-88

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