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A novel 4x8 single-mode independently addressable oxide-isolated VCSEL array

被引：12
作者：
Giaretta, G
Li, MY
Li, GS
Yuen, WP
ChangHasnain, CJ
机构：
[1] UNIV CALIF BERKELEY,DEPT ELECT ENGN & COMP SCI,BERKELEY,CA 94720
[2] STANFORD UNIV,DEPT APPL PHYS,PALO ALTO,CA 94305
[3] STANFORD UNIV,DEPT ELECT ENGN,PALO ALTO,CA 94305
来源：
IEEE PHOTONICS TECHNOLOGY LETTERS | 1997年 / 9卷 / 09期
基金：
美国国家科学基金会;
关键词：
laser arrays; quantum-well lasers; semiconductor laser arrays; semiconductor lasers; surface-emitting lasers;
D O I：
10.1109/68.618475
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We report a novel process to fabricate single-mode independently addressable oxide-isolated vertical-cavity surface-emitting laser (VCSEL) arrays. The array is fabricated with a novel simple two-mask process where a single oxidation layer is used to define the laser aperture and to isolate the interconnects. The 4 x 8 VCSEL array has very uniform electrical, modal and geometrical characteristics that make it ideal for two-dimensional (2-D) array applications.
引用
收藏
页码：1196 / 1198
页数：3
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