INFLUENCE OF RECOIL TRANSPORT ON ENERGY-LOSS AND DAMAGE PROFILES

被引：14

作者：

POSSELT, M ^{[1
]}

BIERSACK, JP ^{[1
]}

机构：

[1] HAHN MEITNER INST KERNFORSCH BERLIN GMBH,D-1000 BERLIN 39,FED REP GER

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1986年 / 15卷 / 1-6期

关键词：

D O I：

10.1016/0168-583X(86)90244-2

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：20 / 24

页数：5

共 15 条

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[8] ION-BEAM EXPOSURE PROFILES IN PMMA-COMPUTER SIMULATION [J].

KARAPIPERIS, L ;

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[9] EFFECT OF RECOIL ATOMS ON RESOLUTION IN ION-BEAM LITHOGRAPHY [J].

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[10]

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